journal article·2024-07-02Open access

Sol-Gel Derived ZnO Thin Films with Nonvolatile Resistive Switching Behavior for Future Memory Applications

Xiangqian Shen, Zhiqiang Yu

Coatings· Volume 14· Issue 7

Abstract

Herein we report on a facile sol-gel spin-coating technique to fabricate ZnO thin films that grow preferentially along the (002) plane on FTO substrates. By employing the magnetron sputtering technique to deposit a tungsten (W) top metal electrode onto these ZnO thin films, we successfully realize a W/ZnO/FTO memory device that exhibits self-rectifying and forming-free resistive switching characteristics. Notably, the as-prepared device demonstrates impressive nonvolatile and bipolar resistive switching behavior, with a high resistance ratio (RHRS/RLRS) exceeding two orders of magnitude at a reading voltage of 0.1 V. Moreover, it exhibits ultralow set and reset voltages of approximately +0.5 V and −1 V, respectively, along with exceptional durability. In terms of carrier transport properties, the low resistance state of the device is dominated by ohmic conduction, whereas the high resistance state is characterized by trap-controlled space-charge-limited current conduction. This work highlights the potential of the ZnO-based W/ZnO/FTO memory device as a promising candidate for future high-density nonvolatile memory applications.
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Research context

OpenAlex topics: Advanced Memory and Neural Computing · Ferroelectric and Negative Capacitance Devices · Transition Metal Oxide Nanomaterials

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

Affiliations

Xinjiang Key Laboratory of Solid State Physics and Devices, School of Physical Science and Technology, Xinjiang University, Urumqi 830046, China

State Key Laboratory of Metal Matrix Composites, Shanghai Jiao Tong University, Shanghai 200240, China

School of Electronic Engineering, Guangxi University of Science and Technology, Liuzhou 545006, China

Wuhan National Laboratory for Optoelectronics, School of Optical and Electronic Information, Huazhong University of Science and Technology, Wuhan 430074, China

Funding

National Natural Science Foundation of China · Scientific Research Foundation of Guangxi University of Science and Technology · Tianshan Innovation Team Program of Xinjiang Uygur Autonomous Region of China · Natural Science Foundation of Xinjiang Uygur Autonomous Region of China

References (65)

Show source-provided references
1. Memristor-The missing circuit element10.1109/TCT.1971.1083337 ↗
2. The missing memristor found10.1038/nature06932 ↗
3. Self-limited single nanowire systems combining allin-one memristive and neuromorphic functionalities10.1038/s41467-018-07330-7 ↗
4. High-efficiency magnetic modulation in Ti/ZnO/Pt resistive random-access memory devices using amorphous zinc oxide film10.1016/j.apsusc.2019.05.129 ↗
5. Mechanism of Nonvolatile Resistive Switching in ZnO/α-Fe2O3 Core-Shell Heterojunction Nanorod Arrays10.1021/acs.jpcc.7b03852 ↗
6. Yu, Z.Q., Jia, J.H., Qu, X.R., Wang, Q.C., Kang, W.B., Liu, B.S., Xiao, Q.Q., Gao, T.H., and Xie, Q. (2023). Tunable resistive switching behaviors and mechanism of the W/ZnO/ITO memory cell. Molecules, 28.10.3390/molecules28145313 ↗
7. Intensity-modulated LED achieved through integrating p-GaN/n-ZnO heterojunction with multilevel RRAM10.1063/1.5058173 ↗
8. Core-shell copper nanowire-TiO2 nanotube arrays with excellent bipolar resistive switching properties10.1016/j.electacta.2019.05.110 ↗
9. Anode-interface localized filamentary mechanism in resistive switching of TiO2 thin film10.1063/1.2749846 ↗
10. Self-rectifying and forming-free nonvolatile memory behavior in single-crystal TiO2 nanowire memory device10.1016/j.jallcom.2020.157749 ↗
11. Cross-Point Arrays with Low-Power ITO-HfO2 Resistive Memory Cells Integrated on Vertical III-V Nanowires10.1002/aelm.202000154 ↗
12. Bipolar Resistive Switching in Junctions of Gallium Oxide and p-type Silicon10.1021/acs.nanolett.1c00539 ↗
13. Yu, Z.Q., Xu, J.M., Liu, B.S., Sun, Z.J., Huang, Q.N., Ou, M.L., Wang, Q.C., Jia, J.H., Kang, W.B., and Xiao, Q.Q. (2023). A Facile Hydrothermal Synthesis and Resistive Switching Behavior of α-Fe2O3 Nanowire Arrays. Molecules, 28.10.3390/molecules28093835 ↗
14. Introducing a thin MnO2 layer in Co3O4-based memory to enhance resistive switching and magnetization modulation behaviors10.1016/j.jallcom.2020.153731 ↗
15. Threshold switching of non-stoichiometric CuO nanowire for selector application10.1063/1.5131733 ↗
16. Self-rectifying and interface-controlled resistive switching characteristics of molybdenum oxide10.1016/j.jallcom.2018.11.275 ↗
17. Formation in Resistive Memories by Self-Assembled Nanoinsulators Derived from a Block Copolymer10.1021/nn503713f ↗
18. Resistive Switching of Sn-doped In2O3/HfO2 core-shell nanowire: Geometry Architecture Engineering for Nonvolatile Memory10.1039/C6NR09564J ↗
19. Modulating metallic conductive filaments via bilayer oxides in resistive switching memory10.1063/1.5098382 ↗
20. Stochastic memristive nature in Co-doped CeO2 nanorod arrays10.1063/1.4851935 ↗
21. A comprehensive review of ZnO materials and devices10.1039/c3cp44451a ↗
22. Multibit Operation of TiOx-Based ReRAM by Schottky Barrier Height Engineering10.1109/LED.2011.2109032 ↗
23. Single CuOx Nanowire Memristor: Forming-Free Resistive Switching Behavior10.1021/am502741m ↗
24. A study on sodium alginate based memristor: From typical to self-rectifying10.1016/j.matlet.2023.134037 ↗
25. DC-magnetron sputtering of ZnO:Al films on (00.1)Al2O3 substrates from slip-casting sintered ceramic targets10.1016/j.apsusc.2014.05.225 ↗
26. ZnO thin films deposition by spray pyrolysis: Influence of precursor solution properties10.1016/j.cap.2012.03.012 ↗
27. Unravelling Resistive Switching Mechanism in ZnO NW Arrays: The Role of the Polycrystalline Base Layer10.1021/acs.jpcc.7b09978 ↗
28. Observation and Impact of a “Surface Skin Effect” on Lateral Growth of Nanocrystals10.1021/acs.jpcc.7b02299 ↗
29. Bipolar resistive switching characteristics of low temperature grown ZnO thin films by plasma-enhanced atomic layer deposition10.1063/1.4774400 ↗
30. Multistate Resistive Switching with Self-Rectifying Behavior and Synaptic Characteristics in a Solution-processed ZnO/PTAA Bilayer Memristor10.1149/1945-7111/ac7754 ↗
31. Bio-realistic synaptic characteristics in the cone-shaped ZnO memristive device10.1038/s41427-018-0105-7 ↗
32. Self-templating faceted and spongy single-crystal ZnO nanorods: Resistive switching and enhanced piezoresponse10.1016/j.matdes.2017.07.039 ↗
33. Effect of seed layers (Al, Ti) on optical and morphology of Fe-doped ZnO thin film nanowires grown on Si substrate via electron beam evaporation10.1016/j.mssp.2017.08.015 ↗
34. Effect of annealing temperature on photoluminescence and resistive switching characteristics of ZnO/Al2O3 multilayer nanostructures10.1016/j.jallcom.2014.09.067 ↗
35. Solution-processable zinc oxide nanorods and a reduced graphene oxide hybrid nanostructure for highly flexible and stable memristor10.1039/C9TC03840J ↗
36. Structural and resistance switching properties of epitaxial Pt/ZnO/TiN/Si(001) heterostructures10.1063/1.4883959 ↗
37. Resistive switching properties and photoabsorption behavior of Ti ion implanted ZnO thin films10.1016/j.ceramint.2021.10.106 ↗
38. High On-Off Ratio Improvement of ZnO-Based Forming-Free Memristor by Surface Hydrogen Annealing10.1021/acsami.5b01080 ↗
39. Effect of oxide/oxide interface on polarity dependent resistive switching behavior in ZnO/ZrO2 heterostructures10.1063/1.4878402 ↗
40. Forming-free bipolar memristive switching of ZnO films deposited by cyclic-voltammetry10.1016/j.electacta.2012.12.030 ↗
41. A Light Incident Angle Switchable ZnO Nanorod Memristor: Reversible Switching Behavior Between Two Non-Volatile Memory Devices10.1002/adma.201303017 ↗
42. Two-Dimensional Materials for Highly Efficient and Stable Perovskite Solar Cells10.1007/s40820-024-01417-1 ↗
43. High uniformity and forming-free ZnO-based transparent RRAM with HfOx inserting layer10.1088/1674-1056/27/8/087701 ↗
44. Neutral Oxygen Beam Treated ZnO-Based Resistive Switching Memory Device10.1021/acsaelm.8b00055 ↗
45. Multistate resistive switching characteristics of ZnO nanoparticles embedded polyvinylphenol device10.1016/j.jiec.2018.02.026 ↗
46. Cost-effective fabrication of memristive devices with ZnO thin film using printed electronics technologies10.1007/s00339-011-6670-z ↗
47. Patil, S.R., Chougale, M.Y., Rane, T.D., Khot, S.S., Patil, A.A., Bagal, O.S., Jadhav, S.D., Sheikh, A.D., Kim, S., and Dongale, T.D. (2018). Solution-Processable ZnO Thin Film Memristive Device for Resistive Random Access Memory Application. Electronics, 7.10.3390/electronics7120445 ↗
48. Resistive switching behaviors of ZnO nanorod layers10.1063/1.3453450 ↗
49. Anomalous rectification in a purely electronic memristor10.1063/1.4963887 ↗
50. A ZnO nanowire resistive switch10.1063/1.4821994 ↗
51. Magnetic-field and white-light controlled resistive switching behaviors in Ag/BiFeO3/γ-Fe2O3/FTO device10.1039/C4RA14605K ↗
52. Manipulated Transformation of Filamentary and Homogeneous Resistive Switching on ZnO Thin Film Memristor with Controllable Multistate10.1021/am4007287 ↗
53. Characteristics of the bipolar resistive switching behavior in memory device with Au/ZnO/ITO structure10.1016/j.cjph.2018.10.019 ↗
54. Influence of Incorporated Pt-Fe2O3 Core-Shell Nanoparticles on the Resistive Switching Characteristics of ZnO Thin Film10.1166/jnn.2015.11487 ↗
55. ZnO1-x Nanorod Arrays/ZnO Thin Film Bilayer Structure: From Homojunction Diode and High-Performance Memristor to Complementary 1D1R Application10.1021/nn303233r ↗
56. Yu, Z.Q., Han, X., Xu, J.M., Chen, C., Qu, X.R., Liu, B.S., Sun, Z.J., and Sun, T.Y. (2023). The Effect of Nitrogen Annealing on the Resistive Switching Characteristics of the W/TiO2/FTO Memory Device. Sensors, 23.10.3390/s23073480 ↗
57. Wafer-scale high anti-reflective nano/micro hybrid interface structures via aluminum grain dependent self-organization10.1016/j.matdes.2020.108960 ↗
58. A facile hydrothermal synthesis and memristive switching performance of rutile TiO2 nanowire arrays10.1016/j.jallcom.2016.07.167 ↗
59. Hydrothermal synthesis and memristive switching behaviors of single-crystalline anatase TiO2 nanowire arrays10.1016/j.jallcom.2016.07.216 ↗
60. Resistive switching characteristics and resistive switching mechanism of Au/TiO2/FTO memristor10.7498/aps.67.20180425 ↗
61. Rate limited filament formation in Al-ZnO-Al bipolar ReRAM cells and its impact on early current window closure during cycling10.1063/1.5087270 ↗
62. Organic-2D composite material-based RRAM with high reliability for mimicking synaptic behavior
63. Oxygen vacancy mediated enhanced photo-absorption from ZnO (0001) nanostructures fabricated by atom beam sputtering10.1063/1.4960515 ↗
64. Self-rectifying resistive switching device based on n-ZnO/p-NiO junction10.1007/s10971-017-4344-9 ↗
65. Resistive switching and synaptic properties modifications in gallium-doped zinc oxide memristive devices10.1016/j.rinp.2019.02.034 ↗