Water-Soluble Biomass Resist Materials Based on Polyglucuronic Acid for Eco-Friendly Photolithography
Source abstract
Abstract
This study presents the development of photolithography employing biomass-based resist materials derived from polyglucuronic acid. Traditional resist materials require coating and developing procedures involving organic solvents, whereas our approach enables the use of water-based spin-coating and developing processes. The water-soluble biomass resist material, derived from polyglucuronic acid, exhibited exceptional photosensitivity at an exposure wavelength of 365 nm and a dose of approximately 90 mJ/cm2. We successfully patterned the microstructures, creating 3 µm lines and 6 µm holes. This organic solvent-free coating process underscores its applicability in scenarios such as in the microfabrication on plastic substrates with limited organic solvent tolerance and surface-patterning biomaterials containing cells and culture components.
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Research context
OpenAlex topics: Nanofabrication and Lithography Techniques · Innovative Microfluidic and Catalytic Techniques Innovation · 3D Printing in Biomedical Research
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
Graduate School of Engineering, Toyama Prefectural University, Imizu 939-0398, Toyama, Japan
Graduate School of Engineering Science, Osaka University, Toyonaka 560-8531, Osaka, Japan
Funding
Japan Society for the Promotion of Science Bilateral Joint Research Projects · TOBE MAKI Scholarship Foundation · OSG Foundation · Izumi Science and Technology Foundation · Amano Institute of Technology Foundation · Iketani Science and Technology Foundation · Takeuchi Foundation · Amada Foundation · Ogasawara Foundation · Die and Mould Technology Promotion Foundation · Lotte Foundation · KOSE Cosmetology Research Foundation · Hayashi Rheology Memorial Foundation · Student Support Associations of Cooperation Between Industry and Academia 2023 · TAU Scholarship 2023 · Marubun Research Promotion Foundation 2023
References (40)
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