Synthesis of LiPON Solid Electrolyte Films by Thermal Evaporation of Lithium Orthophosphate
Source abstract
Abstract
Lithium phosphorus-oxynitride (LiPON) films were deposited by the method of anodic evaporation of Li3PO4 in the nitrogen plasma of a low-pressure arc. A method for adjusting the degree of decomposition of vapors is proposed based on a change in the frequency of interaction of electrons with vapors at a constant heating power of the anode-crucible. The conditions ensuring the formation of films with a homogeneous microstructure and ionic conductivity (1–2) × 10−6 S/cm at a deposition rate of 8 nm/min have been determined. It is shown that the degree of vapor dissociation critically affects the morphology of the films and the magnitude of their ionic conductivity. The results of cyclic tests of LiPON films deposited by anodic evaporation in a low-pressure arc are presented.
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Research context
OpenAlex topics: Advancements in Battery Materials · Advanced Battery Materials and Technologies · Advanced Battery Technologies Research
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Affiliations
Institute of Electrophysics of the Ural Branch of the Russian Academy of Science, 620016 Ekaterinburg, Russia
Funding
Ministry of Science and Higher Education of the Russian Federation
References (25)
Show source-provided references
1. Electrical properties of amorphous lithium electrolyte thin films
2. All Solid-State Thin-Film Lithium-ion Battery with Ti/ZnO/LiPON/LiMn2O4/Ti Structure Fabricated by Magnetron Sputtering10.1016/j.matlet.2017.12.131 ↗
3. Lithium phosphorus oxynitride thin films for rechargeable lithium batteries: Applications from thin-film batteries as micro batteries to surface modification for large-scale batteries10.1016/j.ceramint.2022.02.173 ↗
4. Deposition and performance of all solid-state thin-film lithium-ion batteries composed of amorphous Si/LiPON/VO-LiPO multilayers10.1016/j.tsf.2020.137840 ↗
5. Ultra-thin LiPON films—Fundamental properties and application in solid state thin film model batteries10.1016/j.jpowsour.2014.10.202 ↗
6. Radio-Frequency Magnetron Sputtering Power Effect on the Ionic Conductivities of Lipon Films10.1149/1.1420926 ↗
7. Lithium phosphorous oxynitride films synthesized by a plasma-assisted directed vapor deposition approach10.1116/1.2823491 ↗
8. Plasma-assisted deposition of lithium phosphorus oxynitride films: Substrate bias effects10.1016/j.jpowsour.2008.11.070 ↗
9. The influence of the nitrogen-ion flux on structure and ionic conductivity of vapor deposited lithium phosphorus oxynitride films10.1016/j.jpowsour.2010.08.115 ↗
10. Gavrilov, N., Kamenetskikh, A., Tretnikov, P., Nikonov, A., Sinelnikov, L., Butakov, D., Nikolkin, V., and Chukin, A. (2022). Synthesis of Lithium Phosphorus Oxynitride (LiPON) Thin Films by Li3PO4 Anodic Evaporation in Nitrogen Plasma of a Low-Pressure Arc Discharge. Membranes, 12.10.3390/membranes12010040 ↗
11. Electrochemical properties of LiPON films made from a mixed powder target of Li3PO4 and Li2O10.1016/j.tsf.2011.08.107 ↗
12. Plasma properties during magnetron sputtering of lithium phosphorous oxynitride thin films10.1016/j.jpowsour.2014.09.174 ↗
13. Effects of sputtering pressure on the characteristics of lithium ion conductive lithium phosphorous oxynitride thin film10.1007/s10832-006-8976-3 ↗
14. Chemical/morphological transition behavior of lithium phosphorus oxynitride solid-electrolyte in air: An analytical approach based on X-ray photoelectron spectroscopy and atomic force microscopy10.1016/j.jpowsour.2018.07.081 ↗
15. Barsoukov, E., and Macdonald, J.R. (2005). Impedance Spectroscopy: Theory, Experiment and Applications, Wiley.10.1002/0471716243 ↗
16. Chemical and microstructural modifications in LiPON thin films exposed to atmospheric humidity10.1016/j.ssi.2011.01.001 ↗
17. Thin film Li electrolytes for all-solid-state micro-batteries10.1504/IJSURFSE.2009.024360 ↗
18. Assessing the potential of LiPON-based electrical double layer microsupercapacitors for on-chip power storage10.1016/j.jpowsour.2020.227786 ↗
19. A Double Layer Supercapacitor for Wide Temperature Range10.18500/1608-4039-2019-19-3-141-147 ↗
20. Role of the chemical composition and structure on the electrical properties of a solid state electrolyte: Case of a highly conductive LiPON10.1016/j.electacta.2017.11.021 ↗
21. Interfaces Between Cathode and Electrolyte in Solid State Lithium Batteries: Challenges and Perspectives10.3389/fchem.2018.00616 ↗
22. Recent progress in all-solid-state lithium batteries: The emerging strategies for advanced electrolytes and their interfaces10.1016/j.ensm.2020.05.019 ↗
23. A “Lithium-Free” Thin-Film Battery with an Unexpected Cathode Layer10.1149/1.2798985 ↗
24. Stabilizing lithium plating-stripping reaction between a lithium phosphorus oxynitride glass electrolyte and copper thin film by platinum insertion10.1016/j.jpowsour.2010.10.014 ↗
25. In Situ Scanning Electron Microscope Observations of Li Plating/Stripping Reactions with Pt Current Collectors on LiPON Electrolyte10.1149/2.0411807jes ↗