Epitaxial Growth of Cobalt Oxide Thin Films on Sapphire Substrates Using Atmospheric Pressure Mist Chemical Vapor Deposition

This study demonstrated the epitaxial growth of single-phase (111) CoO and (111) Co3O4 thin films on a-plane sapphire substrates using an atmospheric pressure mist chemical vapor deposition (mist-CVD) process. The phase structure of the grown cobalt oxide films was manipulated by controlling the growth temperature and process ambient, confirmed through X-ray diffraction, Raman spectroscopy, and X-ray photoelectron spectroscopy. Furthermore, the electrical properties of Co3O4 films were significantly improved after thermal annealing in oxygen ambient, exhibiting a stable p-type conductivity with an electrical resistivity of 8.35 Ohm cm and a carrier concentration of 4.19 × 1016 cm−3. While annealing CoO in oxygen atmosphere, the Co3O4 films were found to be most readily formed on the CoO surface due to the oxidation reaction. The orientation of the atomic arrangement of formed Co3O4 was epitaxially constrained by the underlying CoO epitaxial layer. The oxidation of CoO to Co3O4 was largely driven by outward diffusion of cobalt cations, resulting in the formation of pores in the interior of formed Co3O4 films.