journal article·2021-10-29Open access

Integration of Fluorescent, NV-Rich Nanodiamond Particles with AFM Cantilevers by Focused Ion Beam for Hybrid Optical and Micromechanical Devices

Mateusz Ficek, Maciej J. Głowacki, Krzysztof Gajewski, Piotr Kunicki, Ewelina Gacka, Krystian Sycz, Mariusz Mrózek, Adam M. Wojciechowski, Teodor P. Gotszalk, Wojciech Gawlik, Robert Bogdanowicz

Coatings· Volume 11· Issue 11

Abstract

In this paper, a novel fabrication technology of atomic force microscopy (AFM) probes integrating cantilever tips with an NV-rich diamond particle is presented. Nanomanipulation techniques combined with the focused electron beam-induced deposition (FEBID) procedure were applied to position the NV-rich diamond particle on an AFM cantilever tip. Ultrasonic treatment of nanodiamond suspension was applied to reduce the size of diamond particles for proper geometry and symmetry. The fabricated AFM probes were tested utilizing measurements of the electrical resistance at highly oriented pyrolytic graphite (HOPG) and compared with a standard AFM cantilever performance. The results showed novel perspectives arising from combining the functionalities of a scanning AFM with optically detected magnetic resonance (ODMR). In particular, it offers enhanced magnetometric sensitivity and the nanometric resolution.
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Research context

OpenAlex topics: Diamond and Carbon-based Materials Research · Force Microscopy Techniques and Applications · Mechanical and Optical Resonators

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

Affiliations

Department of Metrology and Optoelectronics, Faculty of Electronics, Telecommunications and Informatics, Gdańsk University of Technology, G. Narutowcza 11/12, 80-233 Gdańsk, Poland

Department of Nanometrology, Faculty of Microsystem Electronics and Photonics, Wrocław University of Science and Technology, Janiszewskiego 11/17, 50-372 Wrocław, Poland

Department of Photonics, Institute of Physics, Jagiellonian University, St. Łojasiewicza 11, 30-348 Kraków, Poland

Funding

Foundation for Polish Science · National Science Center

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