Effect of Working Pressure on Tribological Properties of Ce-Ti/MoS2 Coatings Using Magnetron Sputter
Source abstract
Abstract
In preparing MoS2-based coatings by magnetron sputtering, the working pressure of the vacuum chamber directly affects the number and kinetic energy of sputtering particles, which causes a difference in coatings structure and performance. In this paper, MoS2 composite coatings with Ce and Ti binary doping were prepared by unbalanced magnetron sputtering technology, and the variation of composition, structure, and tribological properties of Ce-Ti/MoS2 coatings under different working pressures was studied. The results demonstrated that Ce and Ti doping improves pure MoS2 coatings. The Ce-Ti/MoS2 coatings reached the hardness of 9.02 GPa and the friction coefficient of 0.065 when working pressure was at 0.6 Pa. It was also observed that the deposition efficiency and wear rate reached the optimal value at 0.9 Pa. With the increase of working pressure, the columnar structure of the coating was coarse due to the change of kinetic energy and quantity of particles in the chamber. The intensity of the MoS2 (002) diffraction peak decreased, which eventually led to a poor lubrication effect and aggravated wear. This study provides technical guidance for preparing metal-doped MoS2 composite coatings with excellent mechanical and tribological properties.
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Research context
OpenAlex topics: Metal and Thin Film Mechanics · Tribology and Wear Analysis · Lubricants and Their Additives
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
School of Mechatronics Engineering, Henan University of Science and Technology, No. 48 Xiyuan Street, Luoyang 471003, China
Henan Key Laboratory for Machinery Design and Transmission System, Henan University of Science and Technology, No. 48 Xiyuan Street, Luoyang 471003, China
Longmen Laboratory, No. 1 Keji Street, Luoyang 471000, China
Funding
National Key Research and Development Program · Project of Science and Technology Development of Henan Province
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