Influence of Sputtering Power on the Electrical Properties of In-Sn-Zn Oxide Thin Films Deposited by High Power Impulse Magnetron Sputtering
Source abstract
Abstract
In-Sn-Zn oxide (ITZO) thin films have been studied as a potential material in flat panel displays due to their high carrier concentration and high mobility. In the current work, ITZO thin films were deposited on glass substrates by high-power impulse magnetron sputtering (HiPIMS) at room temperature. The influence of the sputtering power on the microstructures and electrical performance of ITZO thin films was investigated. The results show that ITZO thin films prepared by HiPIMS were dense and smooth. There were slight variations in the composition of ITZO thin films deposited at different sputtering powers. With the sputtering power increasing from 100 W to 400 W, the film’s crystallinity was enhanced. When the sputtering power was 400 W, an In2O3 (104) plane could be detected. Films with optimal electrical properties were produced at a sputtering power of 300 W, a carrier mobility of 31.25 cm2·V−1·s−1, a carrier concentration of 9.11 × 1018 cm−3, and a resistivity of 2.19 × 10−4 Ω·m.
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Research context
OpenAlex topics: ZnO doping and properties · Thin-Film Transistor Technologies · Gas Sensing Nanomaterials and Sensors
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
School of Space Science and Physics, Shandong Provincial Key Laboratory of Optical Astronomy and Solar-Terrestrial Environment, Shandong University at Weihai, Weihai 264209, China
Shenzhen Key Laboratory of Quantum Science and Engineering, Southern University of Science and Technology, Shenzhen 518055, China
Department of Materials Engineering and Center for Plasma and Thin Film Technologies, Ming Chi University of Technology, Taipei 243, Taiwan
College of Engineering, Chang Gung University, Taoyuan 333, Taiwan
Department of Mechanical Engineering, National Taiwan University, Taipei 106, Taiwan
The Key Lab of Guangdong for Modern Surface Engineering Technology, National Engineering Laboratory for Modern Materials Surface Engineering Technology, Guangdong Institute of New Materials, Guangzhou 510651, China
Funding
Natural Science Foundation of Shandong Province · Ministry of Science and Technology, Taiwan · Key Lab of Guangdong for Modern Surface Engineering Technology · Young Scholars Program of Shandong University, Weihai
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