Diamond-Like Carbon Films with Low Internal Stress by a Simple Bilayer Approach
Source abstract
Abstract
Amorphous carbon films with a high hardness usually suffer from high internal stress. To deposit films with a hard top surface but reduced internal stress, a simple bilayer approach was used. Films were prepared by plasma source ion implantation, using only hydrocarbon precursors. The single layer with the highest hardness (deposited by a low direct current (DC) voltage and radio frequency (RF) generation of the plasma) has the highest internal stress with more than 3.5 GPa. By adding an interlayer with a lower hardness, the resulting stress of the bilayer film can be reduced to below 1.4 GPa while maintaining the high hardness of the top layer. By avoiding metallic interlayers or dopants within the films, the deposition process can be kept simple and cost-effective, and it is also suitable for three-dimensional samples.
Source: crossref · Quality: baseline
Research context
OpenAlex topics: Diamond and Carbon-based Materials Research · Metal and Thin Film Mechanics · Lubricants and Their Additives
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
SANNO Co., Ltd., Yokohama 223-0052, Japan
Department of Materials Science, Technische Universität Darmstadt, 64287 Darmstadt, Germany
References (45)
Show source-provided references
1. Diamond-like amorphous carbon10.1016/S0927-796X(02)00005-0 ↗
2. Mechanical and thermophysical properties of diamond-like carbon (DLC) films with different sp3sp2 ratios10.1016/0925-9635(93)90245-W ↗
3. Hardness and elastic modulus of diamond and diamond-like carbon films10.1016/0040-6090(93)90618-Y ↗
4. Hatada, R., Flege, S., Ashraf, M.N., Timmermann, A., Schmid, C., and Ensinger, W. (2020). The Influence of preparation conditions on the structural properties and hardness of diamond-like carbon films, prepared by plasma source ion implantation. Coatings, 10.10.3390/coatings10040360 ↗
5. A finite element analysis of the effects of residual stress, substrate roughness and non-uniform stress distribution on the mechanical properties of diamond-like carbon films10.1016/j.diamond.2011.04.004 ↗
6. Donnet, C., and Erdemir, A. (2008). Residual stresses in dlc films and adhesion to various substrates. Tribology of Diamond-Like Carbon Films: Fundamentals and Applications, Springer.10.1007/978-0-387-49891-1 ↗
7. Thermal expansion coefficient of hydrogenated amorphous carbon10.1063/1.1619557 ↗
8. Thick stress-free amorphous-tetrahedral carbon films with hardness near that of diamond10.1063/1.120515 ↗
9. The effect of annealing on mechanical and tribological properties of diamond-like carbon multilayer films10.1016/j.diamond.2004.06.041 ↗
10. Donnet, C., and Erdemir, A. (2008). Doping and alloying effects on DLC coatings. Tribology of Diamond-like Carbon Films: Fundamentals and Applications, Springer.10.1007/978-0-387-49891-1 ↗
11. Bouabibsa, I., Lamri, S., and Sanchette, F. (2018). Structure, mechanical and tribological properties of Me-Doped diamond-like carbon (DLC) (Me = Al, Ti, or Nb) hydrogenated amorphous carbon coatings. Coatings, 8.10.3390/coatings8100370 ↗
12. Effects of Cr concentrations on the microstructure, hardness, and temperature-dependent tribological properties of Cr-DLC coatings10.1016/j.apsusc.2013.09.036 ↗
13. Mechanical and tribological properties of Ti-DLC films with different Ti content by magnetron sputtering technique10.1016/j.apsusc.2012.01.072 ↗
14. Composition and morphology of metal-containing diamond-like carbon films obtained by reactive magnetron sputtering10.1016/j.tsf.2004.11.178 ↗
15. Plasma source ion implantation: A new, cost-effective, non-line-of-sight technique for ion implantation of materials10.1016/0257-8972(88)90033-3 ↗
16. Anders, A. (2000). Handbook of Plasma Immersion Ion Implantation and Deposition, John Wiley & Sons.
17. Tribological properties of ultrathin DLC films with and without metal interlayers10.3938/jkps.51.1124 ↗
18. DLC multilayer coatings for wear protection10.1016/0925-9635(94)00256-8 ↗
19. Effect of film gradient profile on adhesion strength, residual stress and effective hardness of functionally graded diamond-like carbon films10.1016/j.apsusc.2014.05.161 ↗
20. Architecture of multilayer nanocomposite coatings with super-hard diamond-like carbon layers for wear protection at high contact loads10.1016/S0043-1648(96)07425-X ↗
21. Nanomechanical and boundary lubrication properties of titanium carbide and diamond-like carbon nanoperiod multilayer and nanocomposite films10.1016/j.surfcoat.2013.01.037 ↗
22. Hardness of and stress in tungsten carbide–diamond like carbon multilayer coatings10.1016/j.surfcoat.2008.05.051 ↗
23. Microstructure and tribomechanical properties of (Cr, N)-DLC/DLC multilayer films deposited by a combination of filtered and direct cathodic vacuum arcs10.1016/j.diamond.2015.10.019 ↗
24. The microstructure and mechanical properties of multilayer diamond-like carbon films with different modulation ratios10.1016/j.apsusc.2012.10.003 ↗
25. A new process for the development of hard and stable sputtered amorphous carbon films10.1016/S0042-207X(98)00392-3 ↗
26. Multilayers of amorphous carbon prepared by cathodic arc deposition10.1016/S0257-8972(97)00346-0 ↗
27. Study on the diamond-like carbon multilayer films for tribological application10.1016/j.diamond.2005.02.010 ↗
28. Development of diamond-like carbon (DLC) coatings with alternate soft and hard multilayer architecture for enhancing wear performance at high contact stress10.1016/j.surfcoat.2017.03.007 ↗
29. Multilayer DLC coatings via alternating bias during magnetron sputtering10.1016/j.tsf.2011.01.052 ↗
30. Micromechanical properties of hydrogenated diamond-like carbon multilayers10.1016/j.surfcoat.2006.02.052 ↗
31. Deposition of diamond-like carbon films on insulating substrates by plasma source ion implantation10.1016/j.surfcoat.2020.125426 ↗
32. Adherent diamond-like carbon coatings on metals via plasma source ion implantation10.1016/S0257-8972(97)00062-5 ↗
33. Baba, K., Hatada, R., Nakao, S., Miyagawa, S., and Miyagawa, Y. (1998, January 22–26). Miyagawa Formation of diamond like carbon films by plasma source ion implantation from CH4, C2H2 and C6H6. Proceedings of the 1998 International Conference on Ion Implantation Technology, Proceedings (Cat. No.98EX144), IEEE, Kyoto, Japan.10.1109/IIT.1998.813904 ↗
34. Deposition of diamond-like carbon films by plasma source ion implantation with superposed pulse10.1016/S0168-583X(03)00841-3 ↗
35. Hatada, R., Flege, S., Ensinger, W., Hesse, S., Tanabe, S., Nishimura, Y., and Baba, K. (2020). Preparation of Aniline-Based Nitrogen-Containing Diamond-Like Carbon Films with Low Electrical Resistivity. Coatings, 10.10.3390/coatings10010054 ↗
36. Muguruma, T., Iijima, M., Kawaguchi, M., and Mizoguchi, I. (2018). Effects of sp2/sp3 Ratio and Hydrogen Content on In Vitro Bending and Frictional Performance of DLC-Coated Orthodontic Stainless Steels. Coatings, 8.10.3390/coatings8060199 ↗
37. The tension of metallic films deposited by electrolysis10.1098/rspa.1909.0021 ↗
38. A new secondary ion mass spectrometry technique for III-V semiconductor compounds using the molecular ions CsM+10.1063/1.341381 ↗
39. Interpretation of Raman spectra of disordered and amorphous carbon10.1103/PhysRevB.61.14095 ↗
40. Development of plasma-based ion implantation (PBII) techniques at Osaka National Research Institute (ONRI)10.1016/S0257-8972(00)01005-7 ↗
41. Wei, R. (2008). Formation of carbides and diamond-like carbon films by hydrocarbon plasma immersion ion implantation. Plasma Surface Engineering Research and Its Practical Applications, Research Signpost.
42. Structural and mechanical properties of DLC films prepared by bipolar PBII&D10.1016/j.diamond.2011.04.003 ↗
43. DLC film properties obtained by a low cost and modified pulsed-DC discharge10.1016/j.tsf.2007.06.100 ↗
44. Correlation between ID⁄IG ratio from visible Raman spectra and sp2/sp3 ratio from XPS spectra of annealed hydrogenated DLC film10.2320/matertrans.47.1847 ↗
45. Review of the tribology of diamond-like carbon10.1016/0043-1648(93)90210-D ↗