Research Progress of Water–Laser Compound Machining Technology
Source abstract
Abstract
As an emerging industry, laser processing technology has developed rapidly and has gradually become a key technology in transforming traditional manufacturing. It has been widely used in various fields such as industrial production, communication technology, information processing, health care, military, and scientific research. The application and development of laser processing technology is restricted by thermal damage and the processing residues existing in traditional laser processing. However, water laser compound machining can better solve the above-mentioned problems. In water laser compound machining , heat and byproducts can be absorbed and taken away by water to improve processing quality. This paper expounds and analyzes the principles and research of three popular water laser compound machining methods (water-guided laser processing, underwater laser processing and water-jet-assisted laser processing). Furthermore, this paper analyzes the technical difficulties in water laser compound machining and looks forward to the future development trends of this technology.
Source: crossref · Quality: baseline
Research context
OpenAlex topics: Laser Material Processing Techniques · Laser-Ablation Synthesis of Nanoparticles · Advanced Surface Polishing Techniques
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
School of Automotive and Transportation Engineering, Hefei University of Technology, Hefei 230009, China
ActBlue Co., Ltd., Chizhou 247099, China
School of Mechanical Engineering, Hefei University of Technology, Hefei 230009, China
Funding
Science and Technology Major Project of Anhui Provience · Anhui Provincial Natural Science Foundation
References (71)
Show source-provided references
1. Review of X-ray exposure and safety issues arising from ultra-short pulse laser material processing10.1088/1361-6498/abcb16 ↗
2. Water-jet assisted nanosecond laser microcutting of northeast china ash wood: Experimental study10.15376/biores.14.1.128-138 ↗
3. Experimental study on micro-porous patterning using UV pulse laser hybrid process with chemical foaming agent10.1007/s12541-015-0182-2 ↗
4. Current status of water-jet guided laser cutting technology
5. Arf excimer laser micromachining of pyrex, SiC and PZT for rapid prototyping of mems components10.1016/j.sna.2007.01.002 ↗
6. Laser and laser-liquid composite etching of Si wafers
7. Comparative study of laser and water jet-assisted laser surface processing of SiC
8. Cui, X., and Sun, J. (1993). High Pressure Water Jet Technology, Coal Industry Press.
9. Li, X., Huang, S., Tang, J.P., Mu, W.H., Xu, X., and Chen, X.H. (2022). Effects of laser machining aluminum alloy in different media. Micromachines, 13.10.3390/mi13071130 ↗
10. Analysis on flow field and shape structure of circular nozzle water jet
11. Effects of the laser-water-jet processing of silicon carbide10.1134/S0021894422010035 ↗
12. Numerical simulation of water jet-guided laser cutting of carbon fiber-reinforced plastics10.1177/0954405418809776 ↗
13. Effects of a low-pressure water jet assisting the laser etching of polycrystalline silicon10.1007/s00339-018-1987-5 ↗
14. Laser cutting of silicon with the liquid jet guided laser using a chlorine-containing jet media10.1007/s00339-010-6155-5 ↗
15. Surface formation mechanism in waterjet guided laser cutting of a Ni-based superalloy10.1016/j.cirp.2021.03.007 ↗
16. Research on water jet-guided laser micro-hole machining of 6061 aluminum alloy10.1007/s00170-021-07104-4 ↗
17. Research on laser beams focusing and coupling technology of water jet guided laser with high adjustment tolerance10.1016/j.optcom.2021.127677 ↗
18. Liu, Q., Zhao, Y., Meng, J., Zhao, G., Li, L., Zhou, H., Wang, K., Liu, G., Cao, C., and Zheng, Z. (2022). Research on the influence of water-laser coupling cavity and nozzle structure on the flow characteristics of water beam fiber. Iran. J. Sci. Technol. Trans. Mech. Eng., 1–18.10.1007/s40997-022-00524-x ↗
19. Overview on the development and critical issues of water jet guided laser machining technology10.1016/j.optlastec.2020.106820 ↗
20. Water-Jet Guided Laser Cutting Technology-an Overview10.1007/s40516-019-00089-9 ↗
21. Water-jet-guided laser processing for wafer10.1007/BF03266371 ↗
22. Modeling of waterjet guided laser grooving of silicon10.1016/S0890-6955(03)00063-4 ↗
23. Modelling of heat transfer in waterjet guided laser drilling of silicon10.1243/095440503322011326 ↗
24. Water jet guided laser as an alternative to EDM for micro-drilling of fuel injector nozzles: A comparison of machined surfaces10.1016/j.jmapro.2013.08.002 ↗
25. Theoretical study of water jet guided laser technology based on non-uniform electric field deflection water jet10.1016/j.optcom.2019.01.071 ↗
26. Texturing of metallic surfaces for superhydrophobicity by water jet guided laser micro-machining10.1016/j.apsusc.2019.144286 ↗
27. High aspect ratio cutting of metals using water jet guided laser10.1007/s00170-015-7161-8 ↗
28. Experimental study on water jet guided laser micro-machining of mono-crystalline silicon10.1016/j.optlastec.2021.107057 ↗
29. Micromorphology of metallic surfaces for hydrophobicity by waterjet-guided laser processing10.1007/s00170-021-07025-2 ↗
30. Research of process parameter optimization on laser water-jet machining of 6061 aluminum
31. Numerical simulation of water jet-guided laser micromachining of CFRP10.1016/j.mtcomm.2020.101456 ↗
32. Water-jet guided laser drilling of SiC reinforced aluminium metal matrix composites10.1177/0021998319848062 ↗
33. Laser ablation of titanium alloy under a thin and flowing water layer10.1016/j.ijmachtools.2014.10.013 ↗
34. Craters and nanostructures with laser ablation of metal/metal alloy in air and liquid10.1016/j.apsusc.2013.10.072 ↗
35. Micro-machining of silicon wafer in air and under water10.1016/j.optlastec.2010.05.005 ↗
36. Micromachining of silicon by short-pulse laser ablation in air and under water10.1016/j.msea.2003.12.021 ↗
37. Optimization of near-infrared laser drilling of silicon carbide under water10.1016/j.ijheatmasstransfer.2013.12.046 ↗
38. Mechanisms of laser drilling of metal plates underwater10.1063/1.1667273 ↗
39. Effects of immersion depth on the dynamics of cavitation bubbles generated during ns laser ablation of submerged targets10.1016/j.optlaseng.2020.106334 ↗
40. A comparison of dry and underwater laser micromachining of silicon substrates10.4028/www.scientific.net/KEM.443.693 ↗
41. Micromachining of silicon with excimer laser in air and water medium10.1504/IJMTM.2010.034285 ↗
42. Parmar, M., and James, S. (2018). Experimental and modeling study of liquid-assisted–laser beam micromachining of smart ceramic materials. J. Manuf. Mater. Process., 2.10.3390/jmmp2020028 ↗
43. Underwater-laser drilling of aluminum10.1007/s00170-013-5141-4 ↗
44. UV Laser Assisted Processing of Ceramics in Air and in Water
45. Studies on pulsed Nd:YAG laser cutting of thick stainless steel in dry air and underwater environment for dismantling applications10.1016/j.optlastec.2015.02.007 ↗
46. Underwater femtosecond laser micromachining of thin nitinol tubes for medical coronary stent manufacture10.1007/s00339-012-6795-8 ↗
47. Study on process and mechanism of laser drilling in water and air10.1007/s00170-015-8279-4 ↗
48. Surface Morphology of Silicon Induced by Laser Ablation in Flowing Water10.4028/www.scientific.net/MSF.861.115 ↗
49. Solvent-Assisted Laser Drilling of Silicon Carbide10.1111/j.1744-7402.2010.02575.x ↗
50. Laser beam micro-machining under water immersion10.1007/s00170-015-7699-5 ↗
51. Effects of an absorptive coating on the dynamics of underwater laser-induced shock process10.1007/s00339-013-8193-2 ↗
52. Development and parametric study of a water-jet assisted underwater laser cutting process10.1016/j.ijmachtools.2013.01.005 ↗
53. An investigation of hybrid laser-waterjet ablation of silicon substrates10.1016/j.ijmachtools.2012.01.002 ↗
54. Influence of Water Jet Assisted Laser Processing Silicon Carbide
55. An experimental investigation on laser assisted waterjet micro-milling of silicon nitride ceramics10.1016/j.ceramint.2017.12.211 ↗
56. Heat transfer and material ablation in hybrid laser-waterjet microgrooving of single crystalline germanium10.1016/j.ijmachtools.2017.01.002 ↗
57. The stability of 305μm-diameter water jet for jet-guided laser machining10.1007/s00170-014-6692-8 ↗
58. Study on water-assisted laser ablation mechanism based on water layer characteristics10.1016/j.optcom.2019.05.060 ↗
59. CFD aided design and experimental validation of an innovative air assisted pure water jet cutting system10.1016/j.jmatprotec.2014.01.020 ↗
60. Water-Jet Assisted Laser Cutting of Korean Pine (Pinus koraiensis): Process and Parameters Optimization10.15376/biores.15.2.2540-2549 ↗
61. Water assisted pulsed laser machining of micro-structured surface on CVD diamond coating tools10.1016/j.jmapro.2020.04.066 ↗
62. Heating and material removal process in hybrid laser-waterjet ablation of silicon substrates10.1016/j.ijmachtools.2013.12.003 ↗
63. Study on surface quality of wood processed by water-jet assisted nanosecond laser10.15376/biores.13.2.3125-3134 ↗
64. Thermal Investigation of Interaction between High-power CW-laser Radiation and a Water-jet10.1016/j.phpro.2016.08.033 ↗
65. Design and validation of a hybrid laser/water-jet machining system for brittle materials10.2351/1.2900554 ↗
66. Laser Grooving of Composite Materials with the Aid of a Water Jet10.1115/1.2901640 ↗
67. Chen, X.H., Xu, X., Liu, W., Huang, L., Li, H., Wu, C., Mu, W.H., and Li, X. (2020). Study on the Influence of Surface Temperature Field of Aluminum Alloy Etched by Laser Water Jet Composite Machining. Materials, 13.10.3390/ma13143206 ↗
68. An analytical model for the prediction of temperature distribution and evolution in hybrid laser-waterjet micro-machining10.1016/j.precisioneng.2016.07.002 ↗
69. Experiment and simulation study of laser dicing silicon with water-jet10.1016/j.apsusc.2016.06.135 ↗
70. Chen, X.H., Li, X., Wu, C., Ma, Y.P., Zhang, Y., Huang, L., and Liu, W. (2019). Optimization of Processing Parameters for Water-Jet-Assisted Laser Etching of Polycrystalline Silicon. Appl. Sci., 9.10.3390/app9091882 ↗
71. Experimental investigation and optimization of laser induced plasma micromachining using flowing water10.1016/j.optlastec.2020.106067 ↗