Effects of Substrate Rotation Speed on Structure and Adhesion Properties of CrN/CrAlSiN Multilayer Coatings Prepared Using High-Power Impulse Magnetron Sputtering
Source abstract
Abstract
We investigated the effects of substrate rotation speed on the structural and mechanical properties of CrN/CrAlSiN multilayer coatings produced using high-power impulse magnetron sputtering (HiPIMS) on silicon and high-speed steel (HSS) substrates. Structural analysis and characterization of the multilayer coatings were performed using an X-ray diffractometer (XRD), field emission scanning electron microscopy (FE-SEM), an electron probe microanalyzer (EPMA), and a transmission electron microscope (TEM). The thickness of the bi-layer film depended on the substrate rotation speed, as follows: 12 (1.5 rpm), 9.5 (2 rpm), 6 (3 rpm), 4 (4 rpm), and 3.2 nm (5 rpm). The results revealed that the hardness and coating–substrate adhesion strength increased inversely with the thickness of the bi-layer. TEM analysis revealed smaller columnar structures in thinner CrN/CrAlSiN multilayer coatings. The highest results for hardness (20.1 GPa), elastic modulus (336 GPa), and adhesion strength (77 N) were obtained at a substrate rotation speed of 5 rpm. We also investigated the adhesion properties of the multilayer structures and formulated a hypothesis to explain adhesion strength.
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Research context
OpenAlex topics: Metal and Thin Film Mechanics · Diamond and Carbon-based Materials Research · GaN-based semiconductor devices and materials
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
Center for Plasma and Thin Film Technologies, Ming Chi University of Technology, New Taipei City 24301, Taiwan
Department of Materials Engineering, Ming Chi University of Technology, New Taipei City 24301, Taiwan
Funding
Ministry of Science and Technology, Taiwan
References (54)
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