Theoretical and Experimental Analysis of Surface Roughness and Adhesion Forces of MEMS Surfaces Using a Novel Method for Making a Compound Sputtering Target
Source abstract
Abstract
Achieving a compound thin film with uniform thickness and high purity has always been a challenge in the applications concerning micro electro mechanical systems (MEMS). Controlling the adhesion force in micro/nanoscale is also critical. In the present study, a novel method for making a sputtering compound target is proposed for coating Ag–Au thin films with thicknesses of 120 and 500 nm on silicon substrates. The surface topography and adhesion forces of the samples were obtained using atomic force microscope (AFM). Rabinovich and Rumpf models were utilized to measure the adhesion force and compare the results with the obtained experimental values. It was found that the layer with a thickness of 500 nm has a lower adhesion force than the one with 120 nm thickness. The results further indicated that due to surface asperity radius, the adhesion achieved from the Rabinovich model was closer to the experimental values. This novel method for making a compound sputtering target has led to a lower adhesion force which can be useful for coating microgripper surfaces.
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Research context
OpenAlex topics: Force Microscopy Techniques and Applications · Adhesion, Friction, and Surface Interactions · Metal and Thin Film Mechanics
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
Department of Mechanical Engineering, Najafabad Branch, Islamic Azad University, Najafabad 8514143131, Iran
School of Engineering, Macquarie University, Sydney, NSW 2109, Australia
National Institute for Research & Development in Chemistry and Petrochemistry—ICECHIM, Splaiul Independentei no. 202, 6th District, 060021 Bucharest, Romania
Faculty of Applied Chemistry and Materials Science, Department of Inorganic Chemistry, Physical Chemistry and Electrochemistry, University Politehnica of Bucharest, Ghe. Polizu Street, no. 1-7, 011061 Bucharest, Romania
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