Influence of N2/Ar Flow Ratio on Microstructure and Properties of the AlCrSiN Coatings Deposited by High-Power Impulse Magnetron Sputtering
Source abstract
Abstract
The cutting properties of tools can be greatly improved by AlCrSiN coatings. The AlCrSiN coatings with nitrogen content in the range of 28.2–56.3 at.% were prepared by varying the N2/Ar flow ratio from 1/4 to 1/1. The influence of N2/Ar flow ratio on composition, microstructure, and mechanical properties, as well as the tribological properties, of the coatings was investigated. With increasing N content, the coating microstructure gradually evolved from single fcc-(Cr,Al)N (200) phase to the mixture of fcc-(Cr,Al)N and hcp-(Cr,Al)N phase, which corresponds to an increased crystallinity within the coatings. The coating presents the highest hardness and best wear resistance for an N2/Ar flow ratio of 1/1, but the film adhesive strength and inner stress decreased obviously with increasing N2/Ar flow ratio, which was attributed to the rapid reduction of particle kinetic energy induced by the obstruction of neutral nitride particles between target and substrates. The highest H3/E*2 value exhibited the lowest wear rate, at 0.81 × 10−14 m3/(N·m), indicating that it had the best resistance to plastic deformation. The main wear mechanisms of the as-deposited coatings were abrasive wear and adhesive wear. The increasing crystallinity of the interior coatings resulted in higher hardness and better tribological behavior with an increase in N2/Ar flow ratio.
Source: crossref · Quality: baseline
Research context
OpenAlex topics: Metal and Thin Film Mechanics · Diamond and Carbon-based Materials Research · High-Temperature Coating Behaviors
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
National-Local Joint Engineering Laboratory of Intelligent Manufacturing Oriented Automobile Die & Mould, Tianjin University of Technology and Education, Tianjin 300222, China
Tianjin Key Laboratory of High Speed Cutting and Precision Machining, Tianjin University of Technology and Education, Tianjin 300222, China
Global Frontier R&D Center for Hybrid Interface Materials, Pusan National University, Busan 609-735, Korea
School of Materials Science and Technology, Ocean University of China, Qingdao 266100, China
Funding
the National Nature Science Foundation of China · Tianjin Key Research Program of Application Foundation and Advanced Technology · Tianjin Science and Technology correspondent project · Innovation Team Training Plan of Tianjin Universities and colleges
References (38)
Show source-provided references
1. Comparison of the oxidation behavior of CrN flms deposited using continuous dc pulsed dc and modulated pulsed power magnetron sputtering10.1016/j.surfcoat.2012.01.033 ↗
2. Hot corrosion behavior of a Cr-modified aluminide coating on a Ni-based superalloy10.1007/s40195-014-0108-5 ↗
3. A superhard CrAlSiN superlattice coating deposited by a multi-arc ion plating: II. Thermal stability and oxidation resistance10.1016/j.surfcoat.2012.05.143 ↗
4. A study of oxidation behavior of AlTiN-and AlCrN-based multilayer coatings10.1016/j.surfcoat.2017.10.078 ↗
5. Aluminum-rich HPPMS (Cr1−xAlx)N coatings deposited with different target compositions and at various pulse lengths10.1016/j.vacuum.2015.09.028 ↗
6. Review on self-lubricant transition metal dichalcogenide nanocomposite coatings alloyed with carbon10.1016/j.matchemphys.2011.03.078 ↗
7. Comparison of Al-Si-N nanocomposite coatings deposited by HIPIMS and DC magnetron sputtering10.1016/j.surfcoat.2013.06.076 ↗
8. Design of AlCrSiN multilayers and nanocomposite coating for HSS cutting tools10.1016/j.apsusc.2015.05.191 ↗
9. Influence of Si contents on tribological characteristics of CrAlSiN nanocomposite coatings10.1016/j.tsf.2015.02.022 ↗
10. Development of Si-modified CrAlSiN nanocomposite coating for anti-wear application in extreme environment10.1016/j.surfcoat.2015.06.090 ↗
11. The microstructure and mechanical properties evaluation of CrTiAlSiN coatings: Effects of silicon content10.1016/j.tsf.2017.07.058 ↗
12. Structure and tribological performances of CrAlSiN coatings with different Si percentages in seawater10.1016/j.triboint.2017.06.038 ↗
13. Microstructure and Properties of the Cr-Si-N Coatings Deposited by Combining High-Power Impulse Magnetron Sputtering (HiPIMS) and Pulsed DC Magnetron Sputtering10.1007/s40195-017-0609-0 ↗
14. Structural evolution and electrochemical behaviors of multilayer Al-Cr-Si-N coatings10.1016/j.surfcoat.2016.04.017 ↗
15. Effect of incorporating oxygen on microstructure and mechanical properties of AlCrSiON coatings deposited by arc ion plating10.1016/j.surfcoat.2016.12.057 ↗
16. Hybrid dcMS/HPPMS PVD nitride and oxynitride hard coatings for adhesion and abrasion reduction in plastics processing10.1016/j.surfcoat.2016.07.103 ↗
17. (Cr,Al)N/(Cr,Al)ON Oxy-nitride Coatings deposited by Hybrid dcMS/HPPMS for Plastics Processing Applications10.1016/j.surfcoat.2016.07.093 ↗
18. Influence of high power impulse magnetron sputtering pulse parameters on the properties of aluminum nitride coatings10.1016/j.surfcoat.2014.05.028 ↗
19. Superhard nanocomposites: Origin of hardness enhancement, properties and applications10.1016/j.surfcoat.2009.09.033 ↗
20. Industrial applications of superhard nanocomposite coatings10.1016/j.surfcoat.2008.05.038 ↗
21. Mechanically robust TiAlSiN coatings prepared by pulsed-DC magnetron sputtering system: Scratch response and tribological performance10.1016/j.tsf.2017.10.058 ↗
22. Effect of nitrogen flow rate on structure and properties of MoNx coatings deposited by facing target sputtering10.1016/j.jallcom.2017.01.077 ↗
23. Advantages of nanocomposite coatings deposited by high power pulse magnetron sputtering technology10.1016/j.jmatprotec.2008.01.035 ↗
24. Mechanical, microstructural and tribological properties of reactive magnetron sputtered Cr-Mo-N films10.1016/j.jmst.2014.10.001 ↗
25. AlSiTiN and AlSiCrN multilayer coatings: Effects of structure and surface composition on tribological behavior under dry and lubricated conditions10.1016/j.apsusc.2015.12.237 ↗
26. Estimation of residual stress and its effects on the mechanical properties of detonation gun sprayed WC-Co coatings10.1016/j.msea.2009.10.009 ↗
27. Effect of nitrogen-argon flow ratio on the microstructural and mechanical properties of AlSiN thin films prepared by high power impulse magnetron sputtering10.1016/j.surfcoat.2017.01.085 ↗
28. Target material pathways model for high power pulsed magnetron sputtering10.1116/1.1865133 ↗
29. Superhard nanocomposite nc-TiC/a-C:H coatings: The effect of HiPIMS on coating microstructure and mechanical properties10.1016/j.surfcoat.2017.01.021 ↗
30. The effects of the H/E ratio of various Cr-N interlayers on the adhesion strength of CrZrN coatings on tungsten carbide substrates10.1016/j.surfcoat.2015.06.077 ↗
31. Ding, J., Zhang, T., and Yun, J. (2017). Microstructure, Mechanical, Oxidation and Corrosion Properties of the Cr-Al-Si-N Coatings Deposited by a Hybrid Sputtering System. Coatings, 7.10.3390/coatings7080119 ↗
32. Grain boundary stability governs hardening and softening in extremely fine nanograined metals10.1126/science.aal5166 ↗
33. Study on nanocrystalline Cr2O3 films deposited by arc ion plating: I. composition, morphology, and microstructure analysis10.1016/j.surfcoat.2011.10.058 ↗
34. Residual stresses in high-velocity oxy-fuel thermally sprayed coatings—Modelling the effect of particle velocity and temperature during the spraying process10.1016/j.actamat.2007.05.031 ↗
35. The relationship between hardness and scratch adhession10.1016/0040-6090(87)90382-8 ↗
36. Characterisation of cathodic arc evaporated CrTiAlN coatings: Tribological response at room temperature and at 400 °C10.1016/j.matchemphys.2017.01.021 ↗
37. Investigation of the properties of TixCr1−xN coatings prepared by cathodic arc deposition10.1016/j.phpro.2013.11.027 ↗
38. AlTiCrN coatings deposited by hybrid HiPIMS/DC magnetronco-sputtering10.1016/j.vacuum.2016.11.021 ↗