Preparation and Characterization of Sprayed-Yttrium Oxyfluoride Corrosion Protective Coating for Plasma Process Chambers
Source abstract
Abstract
This study investigates the microstructure, mechanical and electrical properties of dense yttrium oxyfluoride (YOF) coatings fabricated by the atmospheric plasma spraying technique. Transmission electron microscopy and X-ray diffraction analysis revealed a well crystallized YOF coating with preferred orientations. The YOF coatings were more porous (approximate porosity 0.5%), with higher hardness (290 ± 30 HV), lower electrical resistivity (1016 Ω⋅cm), and breakdown voltage (5.57 kV), than conventional yttrium-fluoride plasma-protective coating. These results indicate the potential of the YOF coating as a novel antiplasma and corrosion-resistant ceramic.
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Research context
OpenAlex topics: High-Temperature Coating Behaviors · ZnO doping and properties · Luminescence Properties of Advanced Materials
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
Department of Materials Science and Engineering, National Chung Hsing University, Taiching 40227, Taiwan
Department of Industrial Engineering and Management, Da-Yeh University, Changhua 51591, Taiwan
Department of Materials Science and Engineering, Da-Yeh University, Changhua 51591, Taiwan
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