Pulsed Laser Deposited Films for Microbatteries
Source abstract
Abstract
This review article presents a survey of the literature on pulsed laser deposited thin film materials used in devices for energy storage and conversion, i.e., lithium microbatteries, supercapacitors, and electrochromic displays. Three classes of materials are considered: Positive electrode materials (cathodes), solid electrolytes, and negative electrode materials (anodes). The growth conditions and electrochemical properties are presented for each material and state-of-the-art of lithium microbatteries are also reported.
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Research context
OpenAlex topics: Advancements in Battery Materials · Supercapacitor Materials and Fabrication · Transition Metal Oxide Nanomaterials
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
Institut de Minéralogie, de Physique des Matériaux et de Cosmochimie (IMPMC), Campus Pierre et Marie Curie, Sorbonne Université, CNRS UMR 7590, 4 Place Jussieu, 75005 Paris, France
References (100+)
Show source-provided references
1. Chrisey, D.G., and Hubler, G.K. (1994). Pulsed Laser Deposition of Thin Films, Wiley.
2. Bauerle, D. (1996). Laser Processing and Chemistry, Springer.10.1007/978-3-662-03253-4 ↗
3. Fabrication of LiCoO2 thin-film cathodes for rechargeable lithium microbatteries10.1016/S0254-0584(00)00372-2 ↗
4. Preparation and characterization of LiCoO2 thin films by laser ablation deposition10.1149/1.2056123 ↗
5. Preparation of layered-rhombohedral LiCoO2 epitaxial thin films using pulsed laser deposition10.1143/APEX.2.085502 ↗
6. Pulsed laser deposition and characterization of crystalline lithium cobalt dioxide ( LiCoO2 ) thin films10.1149/1.1415029 ↗
7. Growth of LiMn2O4 thin films by pulsed-laser deposition and their electrochemical properties in lithium microbatteries10.1016/S0921-5107(99)00598-X ↗
8. Structure and electrochemistry of thin-film oxides grown by laser-pulsed deposition10.1007/BF02419223 ↗
9. Eason, R. (2007). Films for electrochemical applications. Pulsed Laser Deposition of Thin Films: Applications-Led Growth of Functional Materials, John Wiley & Son Inc.. Chapter 22.
10. Preparation of c-axis oriented thin films of LiCoO2 by pulsed laser deposition and their electrochemical properties10.1016/S0378-7753(00)00580-2 ↗
11. LiCoO2 thin film cathode fabricated by pulsed laser deposition10.1007/s12598-011-0249-x ↗
12. Thin film microbatteries prepared by pulsed laser deposition10.3938/jkps.51.1055 ↗
13. Structural characterization of TiO2 thin films obtained by pulsed laser deposition10.1016/S0169-4332(98)00486-3 ↗
14. Thin film batteries with Li3PO4 solid electrolytes fabricated by pulsed laser deposition10.1149/1.3111821 ↗
15. Gellings, P.J., and Bouwmeester, H.J.M. (1997). Solid State Batteries. Handbook of Solid State Electrochemistry, CRC Press.
16. Pistoia, G. (1994). Thin film technology and microbatteries. Lithium Batteries-New Materials-Development and Perspectives, Elsevier.
17. Pile réversible dont l’électrolyte est un cristal déposé en lame mince par évaporation
18. Thin film electrolyte systems10.1016/0040-6090(77)90380-7 ↗
19. Bates, J.B., Dudney, N.J., Gruzalski, G.R., and Luck, C.F. (1994). Thin Film Battery and Method for Making Same. (5,338,625), U.S. Patent.
20. Electrical properties of amorphous lithium electrolyte thin films10.1016/0167-2738(92)90442-R ↗
21. Fabrication and characterization of amorphous lithium electrolyte thin films and rechargeable thin-film batteries10.1016/0378-7753(93)80106-Y ↗
22. Thin-film rechargeable lithium batteries10.1016/0378-7753(94)02040-A ↗
23. Deposition and characterization of Li2O-SiO2-P2O5 thin films10.1111/j.1151-2916.1993.tb05317.x ↗
24. Rechargeable thin-film lithium batteries10.1016/0167-2738(94)90383-2 ↗
25. Julien, C., and Stoynov, Z. (2000). Lithium microbatteries. Materials for Lithium-Ion Batteries, Springer.10.1007/978-94-011-4333-2_19 ↗
26. Thin film micro-batteries10.1149/2.F04083IF ↗
27. All-solid-state lithium-ion microbatteries: A review of various three-dimensional concepts10.1002/aenm.201000002 ↗
28. Lithium and lithium-ion microbatteries for applications in microelectronic devices: A review10.1016/j.jpowsour.2015.03.164 ↗
29. Latest advances in the manufacturing of 3D rechargeable lithium microbatteries10.1016/j.jpowsour.2015.03.133 ↗
30. In situ analytical electron microscopy for probing nanoscale electrochemistry10.1149/2.F04113if ↗
31. Athin film solid state microbattery10.1016/0167-2738(92)90439-V ↗
32. Comparative study of electrochemical performance of commercial solid-state thin film Li microbatteries10.1016/j.tsf.2018.01.033 ↗
33. (2018, September 28). Enfucell Powers the Internet of Things Revolution. Available online: http://www.enfucell.com/softbattery.
34. (2019, January 01). EnerchipTM Smart Solid State Batteries. Available online: http://www.cymbet.com/products/enerchip-solid-state-batteries.php.
35. (2018, January 01). Thin Film Battery Technology. Available online: http://www.excellatron.com./thin-film-battery-technology.
36. (2019, January 01). Thinergy Micro-Energy Cell Product Family. Available online: https://www.batterypoweronline.com/markets/batteries/thinergy-micro-energy-cell-product-family/.
37. (2014, January 01). NanoEnergyTM. Available online: http:/www.frontedgetechnology.com./gen.htm.
38. (2008, December 22). Ulvac Enables Flexible Li-Ion Battery. Available online: https://fr.scribd.com/document/118211050/196729-Ulvac-Enables.
39. (2016, January 13). Batteries Ultraminces à Durée de vie Etendue de STMicroelectronics Pour L’Alimentation Des Technologies Miniatures de Demain. Available online: https://www.digikey.fr/fr/product-highlight/s/stmicroelectronics/efl700a39-enfilm-rechargeable-battery/.
40. (2011, February 23). Thin Film Rechargeable Batteries from Korea. Available online: https://www.idtechex.com/research/articles/thin-film-rechargeable-batteries-from-korea-00003130.ja.asp?donotredirect=true&setlang=ja.
41. Thin-film lithium-ion battery with amorphous solid electrolyte fabricated by pulsed laser deposition10.1016/j.elecom.2004.02.010 ↗
42. All-solid-state lithium secondary batteries using LiCoO2 particles with pulsed laser deposition coatings of Li2S–P2S5 solid electrolytes10.1016/j.jpowsour.2010.10.103 ↗
43. On the impedance and phase transition of thin film all-solid-state batteries based on the Li4Ti5O12 system10.1016/j.jpowsour.2017.06.044 ↗
44. Thin film lithium battery using stable solid electrolyte Li4SiO4 fabricated by PLD10.1149/1.3393851 ↗
45. Fabrication of solid-state thin-film batteries using LiMnPO4 thin films deposited by pulsed laser deposition10.1016/j.tsf.2015.02.041 ↗
46. Solid-state redox reactions of LiCoO2 (R3m) for 4 volt secondary lithium cells10.1149/1.2059267 ↗
47. Electrochemical behavior of LiMn2O4 and LiCoO2 thin films produced with pulsed laser deposition10.1149/1.1836910 ↗
48. Influence of diffusion plane orientation on electrochemical properties of thin film LiCoO2 electrodes10.1149/1.1471543 ↗
49. Li ion diffusion measurements in V2O5 and Li(Co1−xAlx)O2 thin-film battery cathodes10.1016/S0013-4686(99)00203-0 ↗
50. Physical properties of lithium-cobalt oxides grown by laser ablation
51. Epitaxial growth of LiCoO2 thin films with (001) orientation10.1063/1.4999833 ↗
52. Quality control of epitaxial LiCoO2 thin films grown by pulsed laser deposition10.1557/JMR.2010.0250 ↗
53. Composition controlled LiCoO2 epitaxial thin film growth by pulsed laser deposition10.1117/12.2076710 ↗
54. Effect of deposition condition on structure and morphology of pulsed-laser deposited LiCoO2 films
55. Structural analysis of submicrometer LiCoO2 films10.1149/1.1353570 ↗
56. Characterization of a LiCoO2 thin film cathode grown by pulsed laser deposition10.1080/14786430500156435 ↗
57. Crystal orientation of epitaxial LiCoO2 films grown on SrTiO3 substrates10.1016/j.jpowsour.2013.08.132 ↗
58. Substrate effect on microstructure of LiCoO2 thin film cathodes
59. Substrate effect on the microstructure and electrochemical properties of LiCoO2 thin films grown by PLD10.1016/j.jallcom.2005.09.065 ↗
60. Orientation alignment of epitaxial LiCoO2 thin films on vicinal SrTiO3 (100) substrates10.1016/j.jpowsour.2016.06.015 ↗
61. Liu, D., Chao, Y., Wu, S., Zhong, S., and Lei, M. (2014, January 19–21). Morphology control of LiCoO2 thin film prepared by pulsed laser deposition. Proceedings of the 2013 International Conference on Materials for Renewable Energy and Environment, Chengdu, China.10.1109/ICMREE.2013.6893727 ↗
62. High-rate growth of high-crystallinity LiCoO2 epitaxial thin films by pulsed laser deposition10.1143/APEX.5.055502 ↗
63. Influences of high deposition rate on LiCoO2 epitaxial films prepared by pulsed laser deposition10.1016/j.ssi.2015.06.006 ↗
64. Electromotive force measurements of LiCoO2 electrode on a lithium ion-conducting glass ceramics under mechanical stress10.1016/j.ssi.2015.09.009 ↗
65. Structure and surface morphology of LiCoO2 thin film cathodes prepared by pulsed laser deposition
66. Optical absorption studies of LiCoO2 thin films grown by pulsed laser deposition
67. Optical and electrical properties of laser ablated amorphous LiCoO2 thin film cathodes10.1088/1757-899X/2/1/012037 ↗
68. Structure-related intercalation behaviour of LiCoO2 films10.1016/S0167-2738(02)00298-9 ↗
69. Li diffusion in LiCoO2 thin films prepared by pulsed laser deposition10.1016/j.jpowsour.2005.12.012 ↗
70. Texture effect on the electrochemical properties of LiCoO2 thin films prepared by PLD10.1016/j.electacta.2007.05.019 ↗
71. Lithium intercalation and structural changes at the LiCoO2 surface under high voltage battery operation10.1016/j.jpowsour.2015.12.133 ↗
72. Vasanthi, R., Mangani, I.R., Selladurai, S., and Manoravi, P. (2002, January 15–19). Comparison of LiCo0.97Mg0.03O2 PLD film with bulk for the application of lithium micro-batteries. Proceedings of the 8th Asian Conference on Solid State Ionics: Trends in the New Millennium, Langkawi, Malaysia.
73. Growth and characterization of tetravalent doped LiCoO2 thin film cathodes
74. Synthesis and electrochemical properties of Ti doped LiCoO2 thin film cathodes10.1016/j.jallcom.2009.10.246 ↗
75. Characterization of electrode/electrolyte interface for lithium batteries using in situ synchrotron X-ray reflectometry—A new experimental technique for LiCoO2 model electrode10.1016/j.jpowsour.2007.03.034 ↗
76. Lithium-ion transfer on a LixCoO2 thin film electrode prepared by pulsed laser deposition—Effect of orientation10.1016/j.jpowsour.2007.05.072 ↗
77. Li-ion diffusion in highly (003) oriented LiCoO2 thin film cathode prepared by pulsed laser deposition10.1016/j.jallcom.2005.12.131 ↗
78. Epitaxial LiCoO2 films as a model system for fundamental electrochemical studies of positive electrodes10.1021/am508512q ↗
79. Microscopy study of structural evolution in epitaxial LiCoO2 positive electrode films during electrochemical cycling10.1021/acsami.5b12025 ↗
80. Structural study of epitaxial LiCoO2 films grown by pulsed laser deposition on single crystal SrTiO3 substrates10.1016/j.tsf.2016.05.017 ↗
81. Zaghib, K., Julien, C.M., and Prakash, J. (2003). Growth of nano-structured TiO2-doped LiCoO2 PLD films and their electrochemical properties. New Trends in Intercalation Compounds for Energy Storage and Conversion, The Electrochemical Society.
82. Electrochemical properties of LiCoO2 thin film surface modified by lithium tantalate and lithium niobate coatings10.1016/j.ssi.2017.05.008 ↗
83. Electrochemical effect of lithium tungsten oxide modification on LiCoO2 thin film electrode10.1016/j.jpowsour.2015.03.108 ↗
84. High-power durability of LiCoO2 thin film electrode modified with amorphous lithium tungsten oxide10.1016/j.jpowsour.2017.04.036 ↗
85. Contribution of randomly oriented Li2WO4 with tetragonal symmetry to Li+ ion transfer resistance reduction in lithium ion batteries10.1016/S1452-3981(23)11083-2 ↗
86. Effect of lithium-ion diffusibility on interfacial resistance of LiCoO2 thin film electrode modified with lithium tungsten oxides10.1016/j.jpowsour.2015.11.075 ↗
87. Chowdari, B.V.R., Kawamura, J., Mizusaki, J., and Amezawa, K. (2013). Detection of degradation in LiCoO2 thin films by in situ micro Raman microscopy. Ionics for Sustainable World, Proceedings of the 13th Asian Conference on Solid State Ionics, Sendai, Japan, 17–20 July 2012, World Scientific Publishing Co.
88. Thin-film lithium batteries with 0.3–30 μm thick LiCoO2 films fabricated by high-rate pulsed laser deposition10.1016/j.ssi.2018.02.024 ↗
89. Fabrication of all-solid-state battery using epitaxial LiCoO2 thin films10.1016/j.jpowsour.2014.05.133 ↗
90. Electrochromic lithium nickel oxide thin film by pulsed laser deposition
91. Electrochromic mechanism in nickel oxide thin films grown by pulsed laser deposition
92. Facile synthesis of porous-structured nickel oxide thin film by pulsed laser deposition
93. Pulsed laser deposition of the porous nickel oxide thin film at room temperature for high-rate pseudocapacitive energy storage10.1016/j.elecom.2012.02.023 ↗
94. Synthesis and characterization of LiNiO2 targets for thin film deposition by pulsed laser ablation
95. Microstructural and electrochemical studies on laser ablated LiNiO2 thin films
96. Yuki, Y., Uchiyama, T., Yamamoto, K., and Uchimoto, Y. (2018). Preparation of Li1−xNi1+xO2 thin films by pulsed laser deposition and the electrochemical performance for oxygen evolution reaction in alkaline media. ESC Meeting Abstracts, The Electrochemical Society.10.1149/MA2018-01/44/2585 ↗
97. Structural and optical properties of (LixNi2−xO2) thin films deposited by pulsed laser deposited (PLD) technique at different doping ratio
98. studies of LiNi0.8Co0.2O2 cathode material prepared by the citric acid-assisted sol-gel method for lithium batteries10.1023/A:1008765030990 ↗
99. Synthesis, structural and electrochemical properties of pulsed laser deposited Li(Ni,Co)O2 films10.1016/j.jpowsour.2005.11.065 ↗
100. Highly oriented growth of pulsed-laser deposited LiNi0.8Co0.2O2 films for application in microbatteries10.1021/cm052451u ↗