Research on Thermal Effect and Laser-Induced Damage Threshold of 10.6 µm Antireflection Coatings Deposited on Diamond and ZnSe Substrates

In this study, ZnS/YbF3-10.6 µm antireflection (AR) coatings were fabricated on CVD single-crystal diamond and ZnSe substrates. The spectral characteristics of the coatings and their performance under continuous wave laser radiation at 10.6 µm were systematically investigated. The fabricated AR coatings exhibited excellent spectral properties in the target wavelength range. Both theoretical calculations and experimental results indicated that, at the same power density, the 10.6 µm AR coatings on diamond substrates exhibited a lower temperature rise compared to those deposited on ZnSe substrates. Due to its high thermal conductivity, the diamond substrate is expected to exhibit reduced thermally induced surface distortion. The laser-induced damage threshold (LIDT) test results indicate that the AR coating deposited on the ZnSe substrate exhibits a damage threshold of 11,890 W/cm2, whereas the AR coating on the diamond substrate achieves a threshold of 15,287 W/cm2, representing a 28.5% improvement over the ZnSe substrate. Additionally, graphite formation occurs on the diamond substrate under high power density. These findings provide both theoretical and experimental support for the potential application of diamond materials in high-power laser systems.