journal article·2022-11-14Open access

Magnetron Sputtering of Transition Metal Nitride Thin Films for Environmental Remediation

Linda Aissani, Akram Alhussein, Abdul Zia, Gcina Mamba, Sami Rtimi

Coatings· Volume 12· Issue 11

Abstract

The current economic and ecological situation encourages the use of steel to push the technological limits and offer more cost-effective products. The enhancement of steel properties like wear, corrosion, and oxidation resistance is achieved by the addition of small amounts of chemical elements such as Cr, Ni, Si, N, etc. The steel surface can be protected by different treatments such as heating and coating, among others. For many decades, coatings have been an effective solution to protect materials using thin hard films. Several technologies for thin film deposition have been developed. However, some of them are restricted to certain fields because of their complex operating conditions. In addition, some deposition techniques cannot be applied to a large substrate surface type. The magnetron sputtering deposition process is a good option to overcome these challenges and can be used with different substrates of varying sizes with specific growth modes and for a wide range of applications. In this review article, we present the sputtering mechanism and film growth modes and focus on the mechanical and tribological behavior of nitride thin films deposited by the magnetron sputtering technique as a function of process conditions, particularly bias voltage and nitrogen percentage. The biomedical properties of transition metal nitride coatings are also presented.
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Research context

OpenAlex topics: Metal and Thin Film Mechanics · Semiconductor materials and devices · Diamond and Carbon-based Materials Research

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

Affiliations

Physics Department, ABBES Laghrour—Khenchela University, P.O. Box 1252, Khenchela 40004, Algeria

Laboratory of Active Components and Materials, Larbi Ben M’Hidi University, Oum El Bouaghi 04000, Algeria

LASMIS, Université de Technologie de Troyes, Pôle Technologique Sud Champagne, 26 Rue Lavoisier, 52800 Nogent, France

Faculty of Engineering and Environment, Northumbria University, London E1 7HT, UK

Institute for Nanotechnology and Water Sustainability, College of Science, Engineering and Technology, University of South Africa, Florida, Johannesburg 1709, South Africa

Ecole Polytechnique Fédérale de Lausanne, EPFL-SB-ISIC-GPAO, Station 6, 1015 Lausanne, Switzerland

Global Institute for Water, Environment and Health, 1201 Geneva, Switzerland

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