Structure, Mechanical and Tribological Properties of Me-Doped Diamond-Like Carbon (DLC) (Me = Al, Ti, or Nb) Hydrogenated Amorphous Carbon Coatings
Source abstract
Abstract
Metal containing hydrogenated diamond-like carbon coatings (Me-DLC, Me = Al, Ti, or Nb) of 3 ± 0.2 μm thickness were deposited by a magnetron sputtering-RFPECVD hybrid process in an Ar/H2/C2H2 mixture. The composition and structure were investigated by Energy Dispersive X-ray Spectroscopy (EDS), X-ray Diffraction (XRD), X-ray photoelectron spectroscopy (XPS), and Raman spectroscopy. The residual stress was measured using the curvature method and nanoindentation was used to determine the hardness and the Young’s modulus. A Ball-on-disk tribometer was employed to investigate the frictional properties and sliding wear resistance of films. The results show that the properties depend on the nature and the Me content in the coatings. The doping of the DLC coatings leads to a decrease in hardness, Young’s modulus, and residual stresses. Wear rate of the films first decreases with intermediate Me contents and then increases for higher Me contents. Significant improvements in the friction coefficient on steel as well as in the wear rate are observed for all Al-DLC coatings, and, concerning the friction coefficient, the lowest value is measured at 0.04 as compared to 0.07 for the undoped DLC.
Source: crossref · Quality: baseline
Research context
OpenAlex topics: Diamond and Carbon-based Materials Research · Metal and Thin Film Mechanics · Tribology and Wear Analysis
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
ICD LASMIS, Université de Technologie de Troyes, UMR6281, CNRS, Antenne de Nogent, Pôle Technologique de Sud-Champagne, 52800 Nogent, France
NICCI (Nogent International Center for CVD Innovation), LRC CEA-ICD LASMIS, Université de Technologie de Troyes, Antenne de Nogent, Pôle Technologique de Sud-Champagne, 52800 Nogent, France
References (65)
Show source-provided references
1. Diamond-like amorphous carbon10.1016/S0927-796X(02)00005-0 ↗
2. Serbezov, V., Reifart, N., and Herbst, F. (2009, January 10–12). DLC films for stent applications. Proceedings of the 2009 3rd ICTON Mediterranean Winter Conference, Angers, France.10.1109/ICTONMW.2009.5385606 ↗
3. A review of modified DLC coatings for biological applications10.1016/S0925-9635(03)00081-5 ↗
4. An overview on diamond-like carbon coatings in medical applications10.1016/j.surfcoat.2013.04.015 ↗
5. Biomedical applications of diamond-like carbon (DLC) coatings: A review10.1016/j.surfcoat.2005.07.077 ↗
6. Biomedical applications of diamond-like carbon coatings: A review10.1002/jbm.b.30768 ↗
7. Classification of DLC films in terms of biological response10.1016/j.surfcoat.2012.07.018 ↗
8. Diamond like carbon coatings for potential application in biological implants—A review10.1016/j.triboint.2012.09.006 ↗
9. Diamond-like carbon coatings as biocompatible materials—An overview10.1016/S0925-9635(03)00018-9 ↗
10. Mechanical and tribological properties of diamond-like carbon films prepared on steel by ECR-CVD process10.1016/S0925-9635(01)00459-9 ↗
11. Nanoindentation and nanoscratch behaviors of DLC films growth on different thickness of Cr nanolayers10.1016/j.diamond.2016.10.003 ↗
12. Mechanical properties of DLC films prepared in acetylene and methane plasmas using electron cyclotron resonance microwave plasma chemical vapor deposition10.1016/S0925-9635(01)00460-5 ↗
13. Elasto-plastic deformation and fracture mechanism of a diamond-like carbon film deposited on a Ti–6Al–4V substrate in nano-scratch test10.1016/j.tsf.2004.03.026 ↗
14. Friction control of diamond-like carbon coatings10.1016/S0257-8972(97)00275-2 ↗
15. Friction properties of DLC/DLC contacts in base oil10.1016/j.triboint.2011.03.006 ↗
16. Wear-resistant and low-friction diamond-like-carbon (DLC)-layers for industrial tribological applications under humid conditions10.1016/j.surfcoat.2009.06.005 ↗
17. Tribology of diamond-like carbon films: Recent progress and future prospects10.1088/0022-3727/39/18/R01 ↗
18. Tribological properties of graphite-like and diamond-like carbon coatings10.1016/j.triboint.2004.07.012 ↗
19. Tribological behaviour a-C and a-C:H films doped with Ti in biological solutions10.1016/j.vacuum.2011.03.011 ↗
20. The tribological characteristics of diamond-like carbon films at elevated temperatures10.1016/S0040-6090(98)01093-1 ↗
21. Structural and mechanical properties of a-C:H and Si doped a-C:H thin films grown by LF-PECVD10.1016/j.surfcoat.2009.09.016 ↗
22. Mechanical properties of a-C:H/Si containing a-C:H multilayered coatings grown by LF-PECVD10.1016/j.surfcoat.2008.08.008 ↗
23. Deposition and characterization of multilayer DLC: Mo thin films grown on silicon substrate by off-axis pulsed laser deposition technique10.1016/j.apsusc.2015.01.083 ↗
24. DLC-W coatings tested in combustion engine —Frictional and wear analysis10.1016/j.surfcoat.2014.06.072 ↗
25. Cooper, C.V., Wang, R., Yoon, H.K., and Taher, M.A. (2001). The microstructure and wear behavior of Cr- and W-DLC coatings sputter-deposited onto AISI 52100 substrates as elucidated using focused-ion-beam SEM. MRS Online Proc. Libr. Arch., 697.10.1557/PROC-697-P3.6 ↗
26. Large area and three-dimensional deposition of diamond-like carbon films for industrial applications10.1016/0257-8972(95)08338-3 ↗
27. Tribological and electrical properties of metal-containing hydrogenated carbon films10.1063/1.97968 ↗
28. Recent progress on the tribology of doped diamond-like and carbon alloy coatings: A review10.1016/S0257-8972(97)00611-7 ↗
29. Nanocrystalline carbide/amorphous carbon composites10.1063/1.365784 ↗
30. Application of diamond-like carbon films for anti-abrasion and low friction properties of VCR head drums10.1016/0257-8972(95)02729-7 ↗
31. Mechanical and tribological properties of Ti-DLC films with different Ti content by magnetron sputtering technique10.1016/j.apsusc.2012.01.072 ↗
32. A study of structure and properties of Ti-doped DLC film by reactive magnetron sputtering with ion implantation10.1016/j.apsusc.2011.11.034 ↗
33. Further improving the mechanical and tribological properties of low content Ti-doped DLC film by W incorporating10.1016/j.apsusc.2015.06.040 ↗
34. Deposition and microstructure of Ti-containing diamond-like carbon nanocomposite films10.1016/j.tsf.2004.07.077 ↗
35. Synthesis and electrochemical properties of Ti-doped DLC films by a hybrid PVD/PECVD process10.1016/j.apsusc.2017.10.151 ↗
36. Effect of bias voltage on growth property of Cr-DLC film prepared by linear ion beam deposition technique10.1016/j.vacuum.2010.06.001 ↗
37. Microstructure and property evolution of Cr-DLC films with different Cr content deposited by a hybrid beam technique10.1016/j.vacuum.2010.11.013 ↗
38. Fretting wear and fracture behaviors of Cr-doped and non-doped DLC films deposited on Ti–6al–4V alloy by unbalanced magnetron sputtering10.1016/j.triboint.2013.01.020 ↗
39. Material removal on lubricated steel gears with W-DLC-coated surfaces10.1016/S0257-8972(03)00467-5 ↗
40. Preparation and properties of W-containing diamond-like carbon films by magnetron plasma source ion implantation10.1016/j.surfcoat.2006.02.086 ↗
41. Deposition and properties of Al-containing diamond-like carbon films by a hybrid ion beam sources10.1016/j.jallcom.2011.01.132 ↗
42. Influence of bias voltage on microstructure and properties of Al-containing diamond-like carbon films deposited by a hybrid ion beam system10.1016/j.surfcoat.2012.03.076 ↗
43. The structure and tribological properties of aluminum/carbon nanocomposite thin films synthesized by reactive magnetron sputtering10.1002/sia.3691 ↗
44. Piezoresistive properties of diamond like carbon films containing copper10.1016/j.diamond.2015.10.007 ↗
45. Microstructure and mechanical property of diamond-like carbon films with ductile copper incorporation10.1016/j.surfcoat.2015.04.027 ↗
46. Preparation of metal (W, Mo, Nb, Ti) containing a-C:H films by reactive magnetron sputtering10.1016/j.surfcoat.2003.09.017 ↗
47. Plasma investigations and deposition of metal doped Me-DLC (Me = Al, Ti or Nb) obtained by a magnetron sputtering-RFPECVD hybrid process10.1016/j.surfcoat.2018.09.033 ↗
48. The tension of metallic films deposited by electrolysis10.1098/rspa.1909.0021 ↗
49. Fanchon, J.L. (2006). Guide de Mécanique: Sciences et Technologies Industrielles, Statique, Cinématique, Dynamique, Résistance des Matériaux, Élasticité, Mécanique des Fluides, Vibrations, Nathan. (In French).
50. Sizes and distances of metal clusters in Au-, Pt-, W- and Fe-containing diamond-like carbon hard coatings: A comparative study by small angle X-ray scattering, wide angle X-ray diffraction, transmission electron microscopy and scanning tunnelling microscopy10.1016/S0040-6090(98)01607-1 ↗
51. WC/DLC/WS2 nanocomposite coatings for aerospace tribology10.1023/A:1019163707747 ↗
52. Some aspects of ESCA spectra of single crystals and thin films of titanium carbide10.1143/JJAP.12.1462 ↗
53. XPS study of thin films of titanium oxysulfides10.1016/0039-6028(91)90640-E ↗
54. Casamassima, M. (1991). Caracterisation des Proprietes Acide-Base des Surfaces d’Oxydes d’Aluminium et de Silicium en Vue de la Comprehension des Mecanismes d’Adhesion Avec un Mastic Silicone. [Ph.D. Thesis, ENMP]. (In French).
55. Low temperature XPS studies of NO and N2O adsorption on Al(100)10.1016/0039-6028(89)90383-X ↗
56. Yadav, V.S., Sahu, D.K., Singh, M., and Kumar, K. (2009, January 20–22). Study of Raman spectra of nano-crystalline diamond like carbon (DLC) films composition (sp2:sp3) with substrate temperature. Proceedings of the World Congress on Engineering and Computer Science, San Francisco, CA, USA.
57. Resonant Raman spectroscopy of disordered, amorphous, and diamondlike carbon10.1103/PhysRevB.64.075414 ↗
58. Determination of bonding in diamond-like carbon by Raman spectroscopy10.1016/S0925-9635(01)00730-0 ↗
59. Micro-Raman Studies on DLC coatings10.1002/adem.200500006 ↗
60. Interpretation of Raman spectra of disordered and amorphous carbon10.1103/PhysRevB.61.14095 ↗
61. Modelling studies of amorphous carbon10.1103/PhysRevB.30.870 ↗
62. Properties and prospects for non-crystalline carbons10.1016/S0022-3093(01)00985-1 ↗
63. Stress reduction behavior in metal-incorporated amorphous carbon films: First-principles approach10.1088/1742-6596/29/1/029 ↗
64. Deposition of Ti/C nano-composite DLC films by magnetron DC sputtering with dual targets10.1016/j.vacuum.2009.06.013 ↗
65. Tribological behaviour of nanostructured Ti-C:H coatings for biomedical applications10.1016/j.solidstatesciences.2008.10.006 ↗