journal article·2019-02-27Open access

Nanocomposite Multilayer Binary Nitride Coatings Based on Transition and Refractory Metals: Structure and Properties

Alexander Pogrebnjak, Kateryna Smyrnova, Oleksandr Bondar

Coatings· Volume 9· Issue 3

Abstract

One area of constant interest in many fields of industry is development of functional multilayer coatings that possess excellent performance characteristics. That is why in our brief review the results of studies of structure and properties of multilayer structures based on binary nitrides of transition or refractory metals obtained by various physical-vapor deposition (PVD) techniques are presented. The influence of substrate temperature, substrate bias voltage, bilayer thickness and interface boundaries on the structure of coatings and their properties, such as hardness, plasticity, wear and corrosion resistance, are discussed in detail. This review may be useful for students and growing community of researchers interested in the synthesis-structure-properties relationship in multilayer coatings based on metal nitrides.
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Research context

OpenAlex topics: Metal and Thin Film Mechanics · Diamond and Carbon-based Materials Research · Boron and Carbon Nanomaterials Research

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

Affiliations

Department of Nanoelectronics, Sumy State University, Rymskogo-Korsakova st. 2, 40007 Sumy, Ukraine

Center of Advanced Development “Veritas”, D. Serikbayev East Kazakhstan State Technical University, Protozanov st. 69, 070004 Ust-Kamenogorsk, Republic of Kazakhstan

Funding

Ministry of Education and Science of Ukraine

References (100+)

Show source-provided references
1. Influence of Matrix Type on Negative Capacitance Effect in Nanogranular Composite Films FeCoZr-Insulator10.5755/j01.eee.19.4.1693 ↗
2. Structure, Hardness and Thermal Stability of Nanolayered TiN/CrN Multilayer Coatings10.1016/j.vacuum.2003.08.003 ↗
3. Coatings Tribology—Contact Mechanisms and Surface Design10.1016/S0301-679X(98)00013-9 ↗
4. Single Layer and Multilayer Wear Resistant Coatings of (Ti,Al)N: A Review10.1016/S0921-5093(02)00259-9 ↗
5. Multicomponent and Multiphase Hard Coatings for Tribological Applications10.1016/S0257-8972(00)00783-0 ↗
6. Makhlouf, A.S.H. (2014). Chapter 13—Multi-Layer Smart Coatings for Corrosion Protection of Aluminium Alloys and Steel. Handbook of Smart Coatings for Materials Protection, Woodhead Publishing.
7. Makhlouf, A.S.H. (2014). Chapter 6—Protective Coatings for Automotive, Aerospace and Military Applications: Current Prospects and Future Trends. Handbook of Smart Coatings for Materials Protection, Woodhead Publishing.10.1533/9780857096883.1.121 ↗
8. Comparison of Tribological Characteristics of Nanostructured TiN, MoN and TiN/MoN Arc-PVD Coatings10.3103/S1068366614050031 ↗
9. Tribology of Multilayer Coatings for Wear Reduction: A Review10.1007/s40544-017-0181-7 ↗
10. Microstructures and Properties of Zr/CrN Multilayer Coatings Fabricated by Multi-Arc Ion Plating10.1016/j.triboint.2016.10.036 ↗
11. Mechanical and Tribological Properties of TiN/Ti Multilayer Coating10.1016/j.surfcoat.2010.06.023 ↗
12. Structural, Mechanical and Tribocorrosion Behaviour in Artificial Seawater of CrN/AlN Nano-Multilayer Coatings on F690 Steel Substrates10.1016/j.apsusc.2017.09.166 ↗
13. The Structure and Properties of High-Entropy Alloys and Nitride Coatings Based on Them10.1070/RCR4407 ↗
14. Structures and Properties of Hard and Superhard Nanocomposite Coatings10.3367/UFNe.0179.200901b.0035 ↗
15. Investigation of Wear Dynamics for Cutting Tools with Multilayer Composite Nanostructured Coatings in Turning Constructional Steel10.1016/j.wear.2018.12.033 ↗
16. Toughness Enhancement in Hard Ceramic Thin Films by Alloy Design10.1063/1.4822440 ↗
17. Limiting Conditions for Application of PVD (TiAlN) and CVD (TiCN/Al2O3/TiN) Coated Cemented Carbide Grades in the Turning of Hardened Steels10.1016/j.wear.2018.10.007 ↗
18. Ahmad, Z. (2006). Chapter 1—Introduction to Corrosion. Principles of Corrosion Engineering and Corrosion Control, Butterworth-Heinemann.10.1016/B978-075065924-6/50002-7 ↗
19. A New Type of (TiZrNbTaHf)N/MoN Nanocomposite Coating: Microstructure and Properties Depending on Energy of Incident Ions10.1016/j.compositesb.2018.04.015 ↗
20. Barshilia, H.C., Deepthi, B., and Rajam, K.S. (2010). Chapter 10—Transition Metal Nitride-Based Nanolayered Multilayer Coatings and Nanocomposite Coatings as Novel Superhard Materials. Nanostructured Thin Films and Coatings: Mechanical Properties, CRC Press.10.1201/b11763-11 ↗
21. Gaffney, J.S., and Marley, N.A. (2018). Chapter 3—Chemical Bonding—The Formation of Materials. General Chemistry for Engineers, Elsevier.10.1016/B978-0-12-810425-5.00003-5 ↗
22. The Source of Chemical Bonding10.1016/j.shpsa.2013.10.011 ↗
23. Nilsson, A., Pettersson, L.G.M., and Nørskov, J.K. (2008). Chapter 2—Adsorbate Electronic Structure and Bonding on Metal Surfaces. Chemical Bonding at Surfaces and Interfaces, Elsevier.10.1016/B978-044452837-7.50001-0 ↗
24. Stephanos, J.J., and Addison, A.W. (2017). Chapter 3—Chemical Bonding. Electrons, Atoms and Molecules in Inorganic Chemistry, Academic Press.10.1016/B978-0-12-811048-5.00003-1 ↗
25. Novel and Facile Route for the Synthesis of Tunable Boron Nitride Nanotubes Combining Atomic Layer Deposition and Annealing Processes for Water Purification10.1002/admi.201800056 ↗
26. Mechanical Properties of Boron Nitride Thin Films Prepared by Atomic Layer Deposition10.1039/C7CE01357D ↗
27. Pierson, H.O. (1996). Handbook of Refractory Carbides and Nitrides: Properties, Characteristics, Processing and Applications, Noyes publications.10.1016/B978-081551392-6.50001-5 ↗
28. Self-Organized Nanostructures in Hard Ceramic Coatings10.1002/adem.200500154 ↗
29. Multilayer PVD Coatings for Wear Protection10.1016/0257-8972(95)02555-3 ↗
30. Wai-Kee, L., Gong-Du, Z., and Thomas, S.W.M. (2008). Advanced Structural Inorganic Chemistry, Oxford University Press Inc.
31. Synthesis and Application of Nano-Structured Metal Nitrides and Carbides: A Review10.1016/j.progsolidstchem.2018.05.001 ↗
32. Othmer, K. (2006). Kirk-Othmer Encyclopedia of Chemical Technology, Wiley-Interscience. [5th ed.].
33. Nanostructured Transition Metal Nitrides for Energy Storage and Fuel Cells10.1016/j.ccr.2012.12.012 ↗
34. Nitrogen-Rich Transition Metal Nitrides10.1016/j.ccr.2013.01.010 ↗
35. Tybulewicz, A. (1973). A Configurational Model of Matter, Consultants Bureau. [1st ed.].
36. Dong, H. (2010). Tribological Properties of Titanium-Based Alloys. Surface Engineering of Light Alloys: Aluminium, Magnesium and Titanium Alloys, Woodhead Publishing Limited.10.1533/9781845699451.1.58 ↗
37. Structural and Electrical Properties of SnS2 Thin Films10.1016/j.matchemphys.2016.01.036 ↗
38. Adaptive Multicomponent Nanocomposite Coatings in Surface Engineering10.3367/UFNe.2016.12.038018 ↗
39. Substrate-Temperature Effect on the Microstructural and Optical Properties of ZnS Thin Films Obtained by Close-Spaced Vacuum Sublimation10.1002/pssa.200824472 ↗
40. Determining the Percolation Threshold for (FeCoZr)x(CaF2)(100−x) Nanocomposites Produced by Pure Argon Ion-Beam Sputtering10.1016/j.jallcom.2016.05.070 ↗
41. Hashmi, S. (2014). Comprehensive Materials Processing, Elsevier. [1st ed.].
42. Toth, L.E. (1971). Transition Metal Carbides and Nitrides, Academic Press. [1st ed.].
43. Goldschmidt, H.J. (1967). Interstitial Alloys, Butterworth-Heinemann. [1st ed.].10.1007/978-1-4899-5880-8 ↗
44. The Influence of Nitrogen Pressure on the Fabrication of the Two-Phase Superhard Nanocomposite (TiZrNbAlYCr)N Coatings10.1016/j.matlet.2017.09.121 ↗
45. Material Selection for Hard Coatings10.1116/1.573700 ↗
46. Nano-Structured Superconducting Single-Photon Detectors10.1016/j.nima.2003.11.305 ↗
47. Kinetic-Inductance-Limited Reset Time of Superconducting Nanowire Photon Counters10.1063/1.2183810 ↗
48. NbN Nanowire Superconducting Single Photon Detectors Fabricated on MgO Substrates10.1080/09500340802677050 ↗
49. Fabrication of High-Speed Single Photon Detectors in NbN for Quantum Information Processing10.1088/1742-6596/43/1/336 ↗
50. Hot-Electrons in Superconducting Nanostructures for Detection of Terahertz Radiation10.1016/j.cryogenics.2008.12.006 ↗
51. Phonon-Cooled Hot-Electron Bolometric Mixer: Overview of Recent Results10.1016/S0964-1807(99)00024-1 ↗
52. Electrical Properties of Nanostructures (CoFeZr)x+(Al2O3)1−x with Use of Alternating Current10.1016/j.vacuum.2009.01.081 ↗
53. Concepts for the Design of Advanced Nanoscale PVD Multilayer Protective Thin Films10.1016/j.jallcom.2008.08.133 ↗
54. Multilayer Coatings for Improved Performance10.1016/0257-8972(94)02407-3 ↗
55. Multilayered Films of Nitride Alloys as Magnetic Head Materials10.1016/0304-8853(91)90360-M ↗
56. Thermal Stability and Oxidation Resistance of TiAlN/CrN Multilayer Coatings10.1016/S0257-8972(97)00353-8 ↗
57. Influence of Ar/N2 Flow Ratio on Structure and Properties of Nanoscale ZrN/WN Multilayered Coatings10.1016/j.surfcoat.2006.07.015 ↗
58. Effects of Interlayer Coupling on the Irreversibility Lines of NbN/AlN Superconducting Multilayers10.1103/PhysRevLett.85.4168 ↗
59. Pauleau, Y. (2006). Surface Modification of Materials by Plasma Immersion Ion Implantation. Materials Surface Processing by Directed Energy Techniques, Elsevier.10.1016/B978-008044496-3/50000-9 ↗
60. Pauleau, Y. (2006). Hard Coatings Based on Metal Nitrides, Metal Carbides and Nanocomposite Materials: PVD Process and Properties. Materials Surface Processing by Directed Energy Techniques, Elsevier.
61. Characterization of Metallic Multilayers for X-Ray Optics10.1016/0304-8853(93)90529-B ↗
62. Deposition and Characterisation of Mo2N/CrN Multilayer Coatings Prepared by Cathodic Arc Evaporation10.1016/j.surfcoat.2015.08.042 ↗
63. Thermal Stability of Nitride Thin Films10.1016/S0042-207X(00)00143-3 ↗
64. Davies, A.G., and Thompson, G.M.T. (2007). Chapter 3—Multilayered Materials: A Palette for the Materials Artist. Advances in Nanoengineering: Electronics, Materials and Assembly, World Scientific Publishing Co.. Chapter 3.
65. Smallman, R.E., and Ngan, A.H.W. (2014). Chapter 10—Surfaces, Grain Boundaries and Interfaces. Modern Physical Metallurgy (Eighth Edition), Butterworth-Heinemann.10.1016/B978-0-08-098204-5.00010-9 ↗
66. Design and Evaluation of Tribological Coatings10.1016/S0043-1648(00)00505-6 ↗
67. Preparation and Behaviour of Wear-Resistant TiC/TiB2, TiN/TiB2 and TiC/TiN Coatings with High Amounts of Phase Boundaries10.1016/0257-8972(88)90011-4 ↗
68. Attempt to Design a Strong Solid10.1103/PhysRevB.2.547 ↗
69. Toughening of Hard Nanostructural Thin Films: A Critical Review10.1016/j.surfcoat.2004.10.020 ↗
70. Nanocrystalline Materials and Coatings10.1016/j.mser.2004.07.001 ↗
71. Architecture of PVD Coatings for Metalcutting Applications: A Review10.1016/j.surfcoat.2014.08.068 ↗
72. Structural and Mechanical Characterization of (TiZrNbHfTa)N/WN Multilayered Nitride Coatings10.1016/j.matlet.2018.07.048 ↗
73. Hard Coating Material Selection Using Multi-Criteria Decision Making10.1016/j.matdes.2012.08.003 ↗
74. Nano-Multilayered Coatings of (TiAlSiY)N/MeN (Me=Mo, Cr and Zr): Influence of Composition of the Alternating Layer on Their Structural and Mechanical Properties10.1016/j.jallcom.2018.07.090 ↗
75. Structural and Mechanical Properties of NbN and Nb-Si-N Films: Experiment and Molecular Dynamics Simulations10.1016/j.ceramint.2016.04.095 ↗
76. The Effects of Cr and Si Additions and Deposition Conditions on the Structure and Properties of the (Zr-Ti-Nb)N Coatings10.1016/j.ceramint.2016.10.008 ↗
77. Effect of Nitrogen Flow Ratio on Microstructure, Mechanical and Tribological Properties of TiWSiNx Thin Film Deposited by Magnetron Co-Sputtering10.1016/j.apsusc.2018.06.129 ↗
78. Hardness Anomaly, Plastic Deformation Work and Fretting Wear Properties of Polycrystalline TiN/CrN Multilayers10.1016/S0043-1648(99)00272-0 ↗
79. Nanometer Scale Multilayered Hard Coatings10.1016/S0042-207X(99)00148-7 ↗
80. The Influence of Ductile Interlayers on the Mechanical Performance of Tungsten Nitride Coatings10.1016/S0924-0136(99)00235-6 ↗
81. The Multilayer Effect in Abrasion—Optimising the Combination of Hard and Tough Phases10.1016/S0257-8972(99)00151-6 ↗
82. Multilayered ZrN/CrN Coatings with Enhanced Thermal and Mechanical Properties10.1016/j.jallcom.2018.10.342 ↗
83. Mattox, D.M. (2010). Handbook of Physical Vapor Deposition (PVD) Processing, Elsevier. [2nd ed.].10.1016/B978-0-8155-2037-5.00008-3 ↗
84. Nanostructured Component Fabrication by Electron Beam-Physical Vapor Deposition10.1361/105994905X56223 ↗
85. Cutting Tool Materials Coated by Chemical Vapour Deposition10.1016/0043-1648(84)90011-5 ↗
86. Stephenson, D.A., and Agapiou, J.S. (2016). Metal Cutting Theory and Practice, CRC Press. [3rd ed.].10.1201/b19559 ↗
87. A Study of TiMoN Nano-Multilayer Coatings Deposited by CFUBMSIP Using DC and HIPIMS Power10.1016/j.apsusc.2011.04.102 ↗
88. Effects of Mechanical Properties and Layer Structure on the Cyclic Dynamic Loading of TiN-Based Coatings10.1016/j.surfcoat.2011.07.079 ↗
89. Dry Sliding Wear Model of Nanometer Scale Multilayered TiN/CrN PVD Hard Coatings10.1007/s11249-004-8086-9 ↗
90. Study of Cracking Mechanisms in Multi-Layered Composite Nano-Structured Coatings10.1016/j.wear.2017.01.101 ↗
91. Delamination and Longitudinal Cracking in Multi-Layered Composite Nano-Structured Coatings and Their Influence on Cutting Tool Life10.1016/j.wear.2017.07.021 ↗
92. Enhancing Mechanical and Tribological Performance of Multilayered CrN/ZrN Coatings10.1016/j.surfcoat.2006.07.093 ↗
93. Low Friction CrN/TiN Multilayer Coatings Prepared by a Hybrid High Power Impulse Magnetron Sputtering/DC Magnetron Sputtering Deposition Technique10.1016/j.tsf.2010.05.061 ↗
94. Structure and Properties of Reactive DC Magnetron Sputtered TiN/NbN Hard Superlattices10.1016/j.surfcoat.2003.09.070 ↗
95. Growth of Single-crystal TiN/VN Strained-layer Superlattices with Extremely High Mechanical Hardness10.1063/1.339770 ↗
96. Mechanical and Tribological Properties of Multilayered PVD TiN/CrN, TiN/MoN, TiN/NbN and TiN/TaN Coatings on Cemented Carbide10.1016/S0257-8972(98)00544-1 ↗
97. Recent Progress in Large Scale Manufacturing of Multilayer/Superlattice Hard Coatings10.1016/S0257-8972(00)00959-2 ↗
98. Mechanical and Tribological Properties of CrN/TiN Superlattice Coatings Deposited by a Combination of Arc-Free Deep Oscillation Magnetron Sputtering with Pulsed Dc Magnetron Sputtering10.1016/j.tsf.2015.09.067 ↗
99. Multilayered Vacuum-Arc Nanocomposite TiN/ZrN Coatings before and after Annealing: Structure, Properties, First-Principles Calculations10.1016/j.matchar.2017.10.016 ↗
100. Superhard CrN/MoN Coatings with Multilayer Architecture10.1016/j.matdes.2018.05.001 ↗