Recent Developments in R.F. Magnetron Sputtered Thin Films for pH Sensing Applications—An Overview
Source abstract
Abstract
pH sensors are widely used in chemical and biological applications. Metal oxides-based pH sensors have many attractive features including insolubility, stability, mechanical strength, electrocatalyst and manufacturing technology. Various metal oxide thin films prepared by radio frequency (R.F.) magnetron sputtering have attractive features, including high pH sensitivity, fast response, high resolution, good stability and reversibility as well as potential for measuring pH under conditions that are not favourable for the commonly used glass electrodes-based pH sensors. In addition, thin film pH sensors prepared by R.F. magnetron sputtering offer many advantages, such as ease of packaging, low cost through the use of standard microfabrication processes, miniaturisation, capability of measuring pH at high temperatures, ruggedness and disposability. In this paper, recent development of R.F. magnetron sputtered thin films for pH sensing applications are reviewed.
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Research context
OpenAlex topics: Analytical Chemistry and Sensors · Gas Sensing Nanomaterials and Sensors · Electrochemical sensors and biosensors
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
Electron Science Research Institute, Edith Cowan University, Joondalup, WA 6027, Australia
Funding
Edith Cowan University · Department of Industry, Innovation, Science, Research and Tertiary Education
References (75)
Show source-provided references
1. Fierro, S., Seishima, R., Osamu, N., Hideyuki, S., and Yasuaki, E. (2013). In vivo pH monitoring using boron doped diamond microelectrode and silver needles: Application to stomach disorder diagnosis. Sci. Rep., 3.10.1038/srep03257 ↗
2. Kohlmann, F.J. (2003). What is pH, and How is it Measured? A Technical Handbook for Industry, Hach Company.
3. Review on state-of-the-art in polymer based pH sensors10.3390/s7123027 ↗
4. Electrochemical sensors10.1021/ac101075n ↗
5. A flexible pH sensor based on the iridium oxide sensing film10.1016/j.sna.2011.05.016 ↗
6. pH sensor based on deposited film of lead oxide on aluminum substrate electrode10.1016/S0925-4005(02)00321-0 ↗
7. ISFET based enzyme sensors10.1016/0265-928X(87)80025-1 ↗
8. Ion sensitive field effect transducer-based biosensors10.1016/S0734-9750(03)00103-4 ↗
9. Ion-sensitive field-effect transistor for biological sensing10.3390/s90907111 ↗
10. pH sensor properties of electrochemically grown iridium oxide10.1016/0925-4005(90)80150-X ↗
11. A solid-state pH sensor based on a nafion-coated iridium oxide indicator electrode and a polymer-based silver chloride reference electrode10.1016/0925-4005(94)01254-7 ↗
12. Review on hydrogel-based pH sensors and microsensors10.3390/s8010561 ↗
13. Chemical and pH sensors based on the swelling behavior of hydrogels10.1016/j.snb.2005.03.040 ↗
14. Fabrication of anodically electrodeposited iridium oxide film pH microelectrodes for microenvironmental studies10.1021/ac020326l ↗
15. Thin-film IrOx pH microelectrode for microfluidic-based microsystems10.1016/j.bios.2004.09.021 ↗
16. Fabrication method and characterization of electrodeposited and heat-treated iridium oxide films for pH sensing10.1016/j.snb.2014.02.004 ↗
17. Sol-Gel iridium oxide-based pH sensor array on flexible polyimide substrate10.1109/JSEN.2012.2236551 ↗
18. Micro pH sensors based on iridium oxide nanotubes10.1109/TNANO.2014.2332871 ↗
19. Iridium oxide pH sensor for biomedical applications. Case urea–urease in real urine samples
20. High-sensitivity pH sensor employing a sub-micron ruthenium oxide thin-film in conjunction with a thick reference electrode10.1016/j.sna.2013.09.003 ↗
21. The effects of sensing electrode thickness on ruthenium oxide thin-film pH sensor10.1016/j.sna.2014.04.007 ↗
22. Preparation and characteristics of ruthenium dioxide for pH array sensors with real-time measurement system10.1016/j.snb.2007.07.023 ↗
23. Sensing characteristics of ruthenium films fabricated by radio frequency sputtering10.1143/JJAP.44.1403 ↗
24. Zhuiykov, S., O’Brien, D., and Best, M. (2009). Water quality assessment by an integrated multi-sensor based on semiconductor RuO2 nanostructures. Meas. Sci. Technol., 20.10.1088/0957-0233/20/9/095201 ↗
25. Electronic semiconducting oxides as pH sensors10.1016/0250-6874(84)80004-9 ↗
26. Electrochromic property of sol-gel derived TiO2 thin film for pH sensor10.1007/978-3-642-21729-6_21 ↗
27. Bahari, N., Zain, A.M., Abdullah, A.Z., Sheng, D.B.C., and Othman, M. (2010, January 28–30). Study on pH sensing properties of RF magnetron sputtered tantalum pentoxide (Ta2O5) thin film. Proceedings of 2010 IEEE International Conference on Semiconductor Electronics, Melaka, Malaysia.
28. Electrochemical impedance spectroscopy study of Ta2O5 based EIOS pH sensors in acid environment
29. Fiber-optic pH sensor based on Sol-Gel film immobilized with neutral red10.1007/s10043-013-0037-y ↗
30. Performance of miniaturized thick-film solid state pH sensors10.1016/j.sna.2013.04.012 ↗
31. A miniaturized pH sensor with an embedded counter electrode and a readout circuit10.1109/JSEN.2013.2245032 ↗
32. Quantitative studies of long-term stable, top-down fabricated silicon nanowire pH sensors10.1007/s00339-011-6754-9 ↗
33. Iridium oxide based coaxial pH ultramicroelectrode10.1016/j.elecom.2013.12.012 ↗
34. Creation of functional layers for pH sensors by galvanic deposition of antimony and bismuth10.11648/j.sjc.20140202.11 ↗
35. Fabrication and characterization of multilayered nanoporous platinum films deposited by electroplating and nonionic surfactant molds10.1016/j.apsusc.2013.04.009 ↗
36. Magnetron sputtering: A review of recent developments and applications10.1016/S0042-207X(99)00189-X ↗
37. Reactive magnetron sputtering of thin films: Present status and trends10.1016/j.tsf.2004.07.041 ↗
38. Recent developments in magneto-optic garnet-type thin-film materials synthesis10.1016/j.proeng.2013.09.248 ↗
39. Bi3Fe5O12:Dy2O3 composite thin film materials for magneto-photonics and magneto-plasmonics10.1364/OME.4.001866 ↗
40. Nano-structured magnetic photonic crystals for magneto-optic polarization controllers at the communication-band wavelengths10.1007/s11082-010-9374-2 ↗
41. In-situ immobilization of quantum dots in polysaccharide-based nanogels for integration of optical pH-sensing, tumor cell imaging, and drug delivery
42. Optical fiber pH sensor based on lossy-mode resonances by means of thin polymeric coatings10.1016/j.snb.2010.12.037 ↗
43. Multifunctional hybrid nanogel for integration of optical glucose sensing and self-regulated insulin release at physiological pH10.1021/nn1008319 ↗
44. Li, J., Huang, X., Xu, W., Xiao, D., and Zhong, Z. (2014). A fiber-optic pH sensor based on relative Fresnel reflection technique and biocompatible coating. Opt. Fiber Technol., 28–31.10.1016/j.yofte.2013.11.002 ↗
45. Fiber optic pH sensor with self-assembled polymer multilayer nanocoatings10.3390/s130201425 ↗
46. Electrochemical sensors10.1021/ac060637m ↗
47. Electrochemical sensors based on organic conjugated polymers10.3390/s8010118 ↗
48. Electrochemical sensors based on metal and semiconductor nanoparticles10.1007/s00604-009-0136-4 ↗
49. Electrochemical sensors and biosensors10.1021/ac202878q ↗
50. Electrochemical sensing in paper-based microfluidic devices10.1039/B917150A ↗
51. Potentiometric miniaturized pH sensors based on polypyrrole films10.1016/j.snb.2006.04.112 ↗
52. Tattoo-based potentiometric ion-selective sensors for epidermal pH monitoring10.1039/C2AN36422K ↗
53. Bandage-based wearable potentiometric sensor for monitoring wound pH10.1002/elan.201300558 ↗
54. A potentiometric disposable sensor strip for measuring pH in saliva10.1016/j.electacta.2014.03.140 ↗
55. A novel pH potentiometric sensor based on electrochemically synthesized polybisphenol a films at an ITO electrode10.1016/j.snb.2011.01.038 ↗
56. Das, At., Das, An., Chang, L.B., Lai, C., Lin, R.M., Chu, F.C., Lin, Y.H., Chow, L., and Jeng, M.J. (2013). GaN thin film based light addressable potentiometric sensor for pH sensing application. Appl. Phys. Express, 6.10.7567/APEX.6.036601 ↗
57. Development of anodic titanium oxide nanotubes applied to a pH sensor with amperometric and potentioimetric methods10.4028/www.scientific.net/AMR.528.10 ↗
58. A nanoporous ruthenium oxide framework for amperometric sensing of glucose and potentiometric sensing of pH10.1007/s00604-012-0774-9 ↗
59. Amperometric pH-sensing biosensors for urea, penicillin, and oxaloacetate
60. Urea biosensor based on amperometric pH-sensing with hematein as a pH-sensitive redox mediator10.1016/S0039-9140(01)00331-9 ↗
61. Polyaniline film based amperometric pH sensor using a novel electrochemical measurement system10.1002/elan.200804500 ↗
62. Recent developments in detection methods for microfabricated analytical devices10.1039/b103795c ↗
63. Electrochemical detection method for nonelectroactive and electroactive analytes in microchip electrophoresis10.1021/ac0490595 ↗
64. Zhang, X., Ju, H., and Wang, J. (2011). Electrochemical Sensors, Biosensors and Their Biomedical Applications, Academic Press.
65. Fabrication and characterization of a ruthenium nitride membrane for electrochemical pH sensors10.3390/s90402478 ↗
66. Titanium nitride membrane application to extended gate field effect transistor pH sensor10.1143/JJAP.40.6311 ↗
67. Harsanyi, G. (2000). Sensors in Biomedical Applications: Fundamentals, Technology and Applications, CRC Press LCC.10.1201/9781420012910 ↗
68. Study on the sensing characteristics and hysteresis effect of the tin oxide pH electrode10.1016/j.snb.2004.11.050 ↗
69. Long-term monitor of seawater by using TiO2:Ru sensing electrode for hard calm cultivation
70. A precise pH microsensor using RF-sputtering IrO2 and Ta2O5 films on Pt-electrode10.1016/j.snb.2013.11.109 ↗
71. Bunjongpru, W., Porntheeraphat, S., Trithaveesak, O., Somwang, N., Khomdet, P., Jeamsaksiri, W., Hruanun, C., Poyai, A., and Nukeaw, J. (2008, January 14–17). The innovative AlN-ISFET based pH sensor. Proceeds of ECTI-CON 2008. 5th International Conference on Electrical Engineering/Electronics, Computer, Telecommunications and Information Technology, Krabi, Thailand.10.1109/ECTICON.2008.4600559 ↗
72. Study on pH at the point of zero charge of TiO2 pH ion-sensitive field effect transistor made by the sputtering method10.1016/j.tsf.2004.09.061 ↗
73. A flexible pH-sensing structure using WO3/IrO2 junction with Al2O3 encapsulation layer
74. Planar ruthenium oxide sensors for cell-on-a-chip metabolic studies
75. High performance GdTixOy electrolyte-insulator-semiconductor pH Sensor and biosensor10.1016/S1452-3981(23)14044-2 ↗