AZO Thin Films by Sol-Gel Process for Integrated Optics
Source abstract
Abstract
Undoped and aluminum-doped zinc oxide (AZO) thin films are prepared by the sol-gel process. Zinc acetate dihydrate, ethanol, and monoethanolamine are used as precursor, solvent, and stabilizer, respectively. In the case of AZO, aluminum nitrate nonahydrate is added to the precursor solution with an atomic percentage equal to 1 and 2 at.% Al. The multi thin layers are deposited by spin-coating onto glass substrates, and are transformed into ZnO upon annealing at 550 °C. Films display a strong preferential orientation, with high values for the Texture Coefficients (TC) of the (002) direction (TC(002) ≈ 3). The structural, morphological, and optical properties of the thin films as a function of aluminum content have been investigated using X-Ray Diffraction (XRD), Atomic Force Microscopy (AFM), and Scanning Electronic Microscopy (SEM). Waveguiding properties of the thin films have been also studied using m-lines spectroscopy. The results indicate that the films are monomodes at 632.8 nm with optical propagation optical losses estimated around 1.6 decibel per cm (dB/cm).
Source: crossref · Quality: baseline
Research context
OpenAlex topics: ZnO doping and properties · Gas Sensing Nanomaterials and Sensors · Acoustic Wave Resonator Technologies
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
Laboratory of Sciences of Processes and Materials (LSPM), CNRS-UPR 3407, Paris 13 University, Sorbonne Paris Cité, 99-Jean-Baptiste Clément Avenue, Villetaneuse 93430, France
Laboratory of Semiconductors, University of Badji Mokhtar, BP 12, Annaba 23000, Algeria
Lasers Physics Laboratory (LPL), CNRS-UMR 7538, Paris 13 University, Sorbonne Paris Cité, 99-Jean-Baptiste Clément Avenue, Villetaneuse 93430, France
References (56)
Show source-provided references
1. ZnO and Its Applications10.1007/978-3-540-73612-7_1 ↗
2. Optical Properties of ZnO and Related Compounds
3. Optimization of the process for preparing Al-doped ZnO thin films by sol-gel method10.1007/s11431-009-0002-y ↗
4. Synthesis of c-axis preferred orientation ZnO:Al transparent conductive thin films using a novel solvent method10.1016/j.tsf.2010.03.143 ↗
5. Nanostructured zinc oxide films synthesized by successive chemical solution deposition for gas sensor applications10.1016/j.materresbull.2008.04.006 ↗
6. Synthesis of nanostructured Al-doped zinc oxide films on Si for solar cells applications10.1016/j.solmat.2009.03.012 ↗
7. Anionic and cationic substitution in ZnO10.1016/j.progsolidstchem.2009.11.008 ↗
8. A comprehensive review of ZnO materials and devices
9. ZnO-nanostructures, defects, and devices10.1016/S1369-7021(07)70078-0 ↗
10. Fabrication of ZnO micro- and nano-structures by electrodeposition using nanoporous and lithography defined templates10.1016/j.mseb.2010.02.037 ↗
11. Growth of arrayed nanorods and nanowires of ZnO from aqueous solutions10.1002/adma.200390108 ↗
12. Effect of heat treatment on microstructural and optical properties of CBD grown Al-doped ZnO thin films10.1016/j.mseb.2010.10.017 ↗
13. Plasma-enhanced chemical vapor deposition of zinc oxide at atmospheric pressure and low temperature10.1016/j.solmat.2007.02.009 ↗
14. The effect of annealing temperature on the properties of ZnO films with preferential nonpolar plane orientation by SSCVD10.1007/s10853-007-2058-z ↗
15. Epitaxial growth of ZnO films10.1016/j.pcrysgrow.2005.01.003 ↗
16. Magnetron Sputtering of ZnO Films10.1007/978-3-540-73612-7_5 ↗
17. Texture Etched ZnO:Al for Silicon Thin Film Solar Cells10.1007/978-3-540-73612-7_8 ↗
18. Catalyst-free synthesis of ZnO nanowires on Si by oxidation of Zn powders10.1016/j.jcrysgro.2005.02.006 ↗
19. Zinc oxide waveguide produced by thermal oxidation of chemical bath deposited zinc sulphide thin films10.1016/S0254-0584(02)00552-7 ↗
20. The effects of Al doping on the optical constants of ZnO thin films prepared by spray pyrolysis method10.1007/s10854-007-9386-2 ↗
21. Influence of annealing temperature on the structural, optical and mechanical properties of ALD-derived ZnO thin films10.1016/j.apsusc.2011.04.088 ↗
22. Comparative study of ZnO thin films prepared by different sol-gel route10.12693/APhysPolA.118.659 ↗
23. Sol-gel-deposited ZnO thin films: A review10.1016/j.mseb.2010.07.001 ↗
24. Preparation of ZnO films with preferential orientation by sol-gel method10.2109/jcersj.104.296 ↗
25. Sol-Gel preparation of ZnO films with extremely preferred orientation along (002) plane from zinc acetate solution10.1016/S0040-6090(97)00231-9 ↗
26. Oriented ZnO thin films synthesis by sol-gel process for laser application10.1016/S0040-6090(02)01219-1 ↗
27. Elaboration of ZnO thin films with preferential orientation by a soft chemistry route10.1023/A:1020795515478 ↗
28. Raman study of oriented ZnO thin films deposited by sol-gel method10.1016/j.saa.2008.03.032 ↗
29. Effects of post-thermal annealing on the optical constants of ZnO thin film10.1016/j.jallcom.2006.10.076 ↗
30. Photoluminescence and refractive index dispersion properties of ZnO nanofibers grown by sol-gel method10.1016/j.saa.2011.10.058 ↗
31. Aluminum-doped zinc oxide transparent conductors deposited by the sol-gel process10.1016/0040-6090(94)90653-X ↗
32. Sol-Gel preparation of transparent and conductive aluminum-doped zinc oxide films with highly preferential crystal orientation10.1111/j.1151-2916.1998.tb02524.x ↗
33. Optical, electrical and structural properties of sol-gel ZnO:Al coatings10.1016/S0040-6090(99)00211-4 ↗
34. Study of structural and electrical properties of grain-boundary modified ZnO films prepared by sol-gel technique10.1016/S0254-0584(01)00402-3 ↗
35. Physical Investigation on ZnO:Al Thin films derived from non-alkoxide zinc acetate via sol-gel dip coating technique
36. Transparent conducting ZnO:Al, In and Sn thin films deposited by the sol-gel method10.1016/S0040-6090(03)00014-2 ↗
37. Effects of Al doping concentration on optical parameters of ZnO:Al thin films by sol-gel technique10.1016/j.physb.2006.01.342 ↗
38. Lai, C.M., Lin, K.M., and Rosmaidah, S. (2011). Effect of annealing temperature on the quality of Al-doped ZnO thin films prepared by sol-gel method. J. Sol.-Gel Sci. Technol.10.1007/s10971-011-2621-6 ↗
39. Sol-gel derived hydrogen annealed ZnO:Al films for silicon solar cell application10.1016/j.solmat.2011.04.024 ↗
40. Low-resistivity ZnO:F:Al transparent thin films10.1016/j.solmat.2004.01.003 ↗
41. Optical constants of Na-doped ZnO thin films by sol-gel method10.1016/j.optcom.2011.01.075 ↗
42. Structural and optical properties of copper doped ZnO films derived by sol-gel10.1016/j.apsusc.2011.11.033 ↗
43. Effect of Sn-doped on microstructural and optical properties of ZnO thin films deposited by sol-gel method10.1016/j.tsf.2008.06.030 ↗
44. Electrical and optical properties of transparent conducting tin doped ZnO thin films
45. Ferromagnetism of ZnO and GaN: A review10.1007/s10854-005-3232-1 ↗
46. Inorganic Materials Integrated Optics10.1063/1.1764024 ↗
47. Theory of prism-film coupler and thin-film light guides10.1364/JOSA.60.001325 ↗
48. The microstructure, optical, and electrical properties of sol-gel-derived Sc-doped and Al-Sc co-doped ZnO thin films10.1016/j.apsusc.2009.07.044 ↗
49. Fityk. Available online:http://fityk.nieto.pl/.
50. Barret, C.S., and Massalski, T.B. (1980). Structure of Metals: Crystallographic Methods, Principles and Data, Pergamon Press.
51. X-ray line broadening from filed aluminium and wolfram10.1016/0001-6160(53)90006-6 ↗
52. On the estimation of average crystallite size of zeolites from the Scherrer equation: A critical evaluation of its application to zeolites with one-dimensional pore systems10.1016/j.micromeso.2008.06.010 ↗
53. Numerical solution of the mode-equation of planar dielectric waveguides to determine their refractive index and thickness by means of a prism-film coupler10.1016/0030-4018(73)90288-5 ↗
54. Nonleaky optical waveguides in KNbO3 by ultralow dose MeV He ion implantation10.1063/1.105724 ↗
55. Loss measurements in thin-film optical waveguides10.1364/AO.12.000755 ↗
56. New approach for loss measurements in optical planar waveguides10.1016/S0030-4018(96)00764-X ↗