Molybdenum Nitride Films: Crystal Structures, Synthesis, Mechanical, Electrical and Some Other Properties
Source abstract
Abstract
Among transition metal nitrides, molybdenum nitrides have been much less studied even though their mechanical properties as well as their electrical and catalytic properties make them very attractive for many applications. The δ-MoN phase of hexagonal structure is a potential candidate for an ultra-incompressible and hard material and can be compared with c-BN and diamond. The predicted superconducting temperature of the metastable MoN phase of NaCl-B1-type cubic structure is the highest of all refractory carbides and nitrides. The composition of molybdenum nitride films as well as the structures and properties depend on the parameters of the process used to deposit the films. They are also strongly correlated to the electronic structure and chemical bonding. An unusual mixture of metallic, covalent and ionic bonding is found in the stoichiometric compounds.
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Research context
OpenAlex topics: Metal and Thin Film Mechanics · Boron and Carbon Nanomaterials Research · MXene and MAX Phase Materials
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
Université de Limoges, CNRS, ENSCI, SPCTS UMR7315, F-87000 Limoges, France
Université de Limoges, CNRS, XLIM UMR6172, F-87060 Limoges, France
References (63)
Show source-provided references
1. Toth, L. (1971). Transition Metal Carbides and Nitrides, Academic Press.
2. Oyama, S.T. (1996). The Chemistry of Transition Carbides and Nitrides, Blackie Academic and Professional.10.1007/978-94-009-1565-7 ↗
3. Gubanov, V.A., Ivanovsky, A.L., and Zhukov, V.P. (1994). Electronic Structure of Refractory Carbides and Nitrides, Cambridge University Press.10.1017/CBO9780511629037 ↗
4. Elastic properties and electronic structures of 4d- and 5d-transition metal mononitrides10.1016/j.jallcom.2010.03.176 ↗
5. AdaptiveMo2N/MoS2/Ag Tribological nanocomposite coatings for aerospace applications10.1007/s11249-007-9286-x ↗
6. Tribological investigations of adaptiveMo2N/MoS2/Ag coatings with high sulfur content10.1016/j.surfcoat.2008.10.040 ↗
7. Thin films of Mo2N/Ag nanocomposite-the structure, mechanical and tribological properties10.1016/j.surfcoat.2006.02.017 ↗
8. Annealing temperature effect on the mechanical and tribological properties of molybdenum nitride thin films10.1186/2193-8865-3-5 ↗
9. Stress control of sputter-deposited Mo–N films for micromechanical applications10.1016/S0167-9317(01)00585-8 ↗
10. Rische, D. (2007). MOCVD of Tungsten and Molybdenum Nitrides. [Ph.D. Thesis, University of Bochum].
11. Alen, P. (2005). Atomic Layer Deposition of TaN, NbN and MoN films for Cu Metallizations. [Ph.D. Thesis, University of Helsinski].10.1149/1.1882012 ↗
12. Guntur, V. (2011). Molybdenum Nitride Films in the Back Contact Structure of Flexible Substrates CdTe Solar Cells. [Ph.D. Thesis, University of South Florida].
13. Diffusion barrier performances of thin Mo, Mo–N and Mo/Mo–N films between Cu and Si10.1016/j.tsf.2004.09.046 ↗
14. Reid, J.S. (2006). MEMS with Flexible Portions Made of Novel Materials. (7071520B2), U.S. Patent.
15. Transition-metal nitrides for hydrotreating catalyst-synthesis, surface properties, and reactivities10.1016/j.apcata.2007.01.006 ↗
16. McKay, D. (2008). Catalysis over Molybdenum Containing Nitride Materials. [Ph.D. Thesis, University of Glasgow].
17. Preparation and adsorption properties of Mo2N model catalyst10.1016/S0169-4332(00)00128-8 ↗
18. On the catalytic nature of VN, Mo2N and W2N nitrides for NO reduction with hydrogen10.1016/j.apcata.2004.08.017 ↗
19. Molybdenum-based catalysts for the decomposition of ammonia: In situ X-ray diffraction studies, microstructure, and catalytic properties10.1016/j.jcat.2013.05.011 ↗
20. Crystal structure and microstructural changes of molybdenum nitrides traces during catalytic reaction by in situ X-ray diffraction studies10.1039/C3CP54578D ↗
21. Catalytic behaviors of β-Mo2N0.78 as a hydrodesulfurization catalyst10.1021/ef050208b ↗
22. The molybdenum-nitrogen phase diagram10.1016/0022-5088(78)90073-5 ↗
23. The Preparation of β-Molybdenum Nitride10.1021/ic50088a018 ↗
24. Crystal structure and high-pressure properties of γ-Mo2N determined by neutron powder diffraction and X-ray diffraction10.1016/j.jssc.2006.03.011 ↗
25. Electronic structures of B1 MoN, fcc Mo2N and hexagonal MoN10.1103/PhysRevB.31.3177 ↗
26. Superconductivity and structural changes of nitrogen-ion implanted Mo thin films10.1088/0305-4608/17/11/016 ↗
27. Surface nitridation of transition metals by pulsed laser irradiation in gaseous nitrogen10.1016/S0257-8972(97)00267-3 ↗
28. High temperature nitrogen plasma immersion ion implantation into molybdenum
29. Deposition of molybdenum nitride films by r.f. reactive magnetron sputtering10.1016/0257-8972(95)02425-5 ↗
30. Structural and mechanical properties of chromium nitride, molybdenum nitride, and tungsten nitride thin films10.1088/0022-3727/36/8/313 ↗
31. Amorphous molybdenum nitride thin films prepared by reactive sputter deposition10.1016/j.mseb.2004.05.010 ↗
32. Stöber, L., Konrath, J.P., Krivec, S., Patocka, F., Schwartz, S., Bittner, A., Schneider, M., and Schmid, U. (2015). Impact of sputter deposition parameters on molybdenum nitride thin films properties. J. Micromech. Microeng., 25.10.1088/0960-1317/25/7/074001 ↗
33. Synthesis and Characterization of superconducting β-MoN crystalline phase on a Si substrate: An application of pulsed laser deposition to nitride chemistry10.1021/cm050708i ↗
34. Investigations on a nitriding process of molybdenum thin films exposed to (Ar–N2–H2) expanding microwave plasma10.1016/j.surfcoat.2008.10.012 ↗
35. Lattice model for the properties of non-stoichiometric cubic and hexagonal molybdenum nitride10.1016/S0925-8388(03)00537-1 ↗
36. Synthesis and characterization of hexagonal molybdenum nitrides10.1016/j.jssc.2006.05.025 ↗
37. Determination of the crystal structure of δ-MoN by neutron diffraction10.1016/j.jssc.2003.11.033 ↗
38. Kanoun, M.B., Goumri-Said, S., and Jaouen, M. (2007). Structure and mechanical stability of molybdenum nitrides: A first-principles study. Phys. Rev. B, 76.10.1103/PhysRevB.76.134109 ↗
39. Displacive phase transition, structural stability, and mechanical properties of the ultra-incompressible and hard MoN by first principles10.1002/pssb.200945575 ↗
40. Superconductivity in MoN films with NaCl structure10.1088/0305-4608/14/7/005 ↗
41. High Tc superconducting B1 phase MoN films prepared by low-energy ion-assisted deposition10.1063/1.339787 ↗
42. Electronic properties of transition-metal nitrides: The group-V and group-VI nitrides VN, NbN, TaN, CrN, MoN, and WN10.1103/PhysRevB.31.752 ↗
43. Low-temperature atmospheric-pressure metal-organic chemical vapor deposition of molybdenum nitride thin films10.1016/S0040-6090(96)08867-0 ↗
44. Synthesis and characterization of thin-film molybdenum nitrides10.1016/0169-4332(93)90267-F ↗
45. Formation of nitrides of the group VI transition metals10.1007/BF00792018 ↗
46. The influence of phase and morphology of molybdenum nitrides on ammonia synthesis activity and reduction characteristics10.1016/j.jssc.2007.12.001 ↗
47. Thermochemistry of Hydrogen Molybdenum Bronze Phases HxMoO310.1016/0022-4596(79)90193-2 ↗
48. β-Molybdenum nitride: Synthesis mechanism and catalytic response in the gas phase hydrogenation of p-chloronitrobenzene10.1039/c0cy00011f ↗
49. High rate thick film growth10.1146/annurev.ms.07.080177.001323 ↗
50. Crystal structure of molybdenum nitride films made by reactive cathodic arc evaporation10.1016/S0257-8972(09)90060-3 ↗
51. Phase formation and diffusion after nitrogen PIII in molybdenum
52. Nitride formation in transition metals during high fluence-high temperature implantation10.1016/j.surfcoat.2005.01.040 ↗
53. Expanding microwave plasma process for thin molybdenum films nitriding: Nitrogen diffusion and structure investigations10.1016/j.surfcoat.2011.03.056 ↗
54. A thermochemical process using expanding plasma for nitriding thin molybdenum films at low temperature10.4236/eng.2012.412109 ↗
55. A reduction-nitridation process of molybdenum films in expanding microwave plasma: Crystal structure of molybdenum nitrides10.1016/j.surfcoat.2015.03.018 ↗
56. Controlling crystal structure and oxidation state in molybdenum nitrides through epitaxial stabilization10.1021/jp2048376 ↗
57. Microstructure of a molybdenum nitride layer formed by nitriding molybdenum metal10.1111/j.1151-2916.2001.tb00810.x ↗
58. Soignard, E., McMillan, P.F., Chaplin, T.D., Farag, S.M., Bull, C.L., Somayazulu, M.S., and Leinenweber, K. (2003). High-Pressure synthesis and study of low-compressibility molybdenum nitride (MoN and MoN1 − x phases). Phys. Rev. B, 68.10.1103/PhysRevB.68.132101 ↗
59. Sahu, B.R., and Kleinman, L. (2004). Theoretical study of structural an electronic properties of δ-MoN. Phys. Rev. B, 70.10.1103/PhysRevB.70.073103 ↗
60. Phonon and elastic instabilities in MoC and MoN10.1103/PhysRevB.61.3151 ↗
61. Synthesis and characterization of nanostructured niobium and molybdenum nitrides by a two steps transition metal halide approach10.1111/j.1551-2916.2011.04412.x ↗
62. Efficient hydrogen evolution catalyzed by molybdenum carbide and molybdenum nitride nanocatalysts synthesized via the urea glass route10.1039/C5TA00139K ↗
63. Recent developments in transition metal carbides and nitrides as hydrogen evolution eletrocatalysts10.1039/c3cc44076a ↗