Electron Beam Lithography at the Rutherford Laboratory
Source abstract
Abstract
The Science Research Council has opened a mask-making facility at the Rutherford Laboratory based on the EBMF-2 Electron Beam Microfabricator. Ancillary equipment designed to support the EBM resolves features down to 1 micron or below. The paper discusses the principles, design parameters and the performance of the EBM and outlines mask manufacturing procedure.
Source: crossref · Quality: baseline
Research context
OpenAlex topics: Advancements in Photolithography Techniques · Electron and X-Ray Spectroscopy Techniques · Plasma Diagnostics and Applications
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Affiliations
Science Research Council, Rutherford Laboratory, Chilton, OXON.
References
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