article·1998-06-01

Dry film photoresists ‐ a never ending success story?

Klaus Maurischat

Publisher page

Abstract

Reviews the use and development of dry film photoresists and liquid resists. Provides an historical perspective and considers factors affecting investment in the future. Discusses both the advantages and limitations of dry film and liquid photoresists. Provides an outlook for future developments.
Source: openalex_inverted_index · Quality: baseline

Research context

OpenAlex topics: Advancements in Photolithography Techniques

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

References

Reference metadata was not supplied for this record.