Dynamic Sterics of Small-Molecule Inhibitors in Area-Selective Atomic Layer Deposition: An Off-Lattice Kinetic Monte Carlo Study
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Abstract
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Research context
OpenAlex topics: Semiconductor materials and devices · Copper Interconnects and Reliability · Semiconductor materials and interfaces
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Affiliations
School of Materials Science and Engineering
Huazhong University of Science and Technology
School of Mechanical Science and Engineering
Funding
National Natural Science Foundation of China · New Cornerstone Science Foundation
References (48)
Show source-provided references
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