In Honor of Professor Markku Leskelä
Source abstract
Abstract
and his decades-long career in the field of atomic layer deposition (ALD).Prof. Leskelähas been the most productive ALD
Only a short abstract or summary was supplied by the source.
Source: openalex_inverted_index · Quality: short
Research context
OpenAlex topics: Semiconductor materials and devices · Analytical Chemistry and Sensors · Radioactive element chemistry and processing
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
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