journal article·2023-02-28Open access

Molecular Layer Deposition of Zeolitic Imidazolate Framework-8 Films

Jorid Smets, Alexander John Cruz, Víctor Rubio-Giménez, Max L. Tietze, Dmitry E. Kravchenko, Giel Arnauts, Aleksander Matavž, Nathalie Wauteraerts, Min Tu, Kristof Marcoen, Inhar Imaz, Daniel Maspoch, Maxim Korytov, Philippe M. Vereecken, Steven De Feyter, Tom Hauffman, Rob Ameloot

Chemistry of Materials· Volume 35· Issue 4

Abstract

Vapor-phase film deposition of metal–organic frameworks (MOFs) would facilitate the integration of these materials into electronic devices. We studied the vapor-phase layer-by-layer deposition of zeolitic imidazolate framework 8 (ZIF-8) by consecutive, self-saturating reactions of diethyl zinc, water, and 2-methylimidazole on a substrate. Two approaches were compared: (1) Direct ZIF-8 “molecular layer deposition” (MLD), which enables a nanometer-resolution thickness control and employs only self-saturating reactions, resulting in smooth films that are crystalline as-deposited, and (2) two-step ZIF-8 MLD, in which crystallization occurs during a postdeposition treatment with additional linker vapor. The latter approach resulted in a reduced deposition time and an improved MOF quality, i.e., increased crystallinity and probe molecule uptake, although the smoothness and thickness control were partially lost. Both approaches were developed in a modified atomic layer deposition reactor to ensure cleanroom compatibility.
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Research context

OpenAlex topics: Metal-Organic Frameworks: Synthesis and Applications · Catalytic Processes in Materials Science · Machine Learning in Materials Science

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

Affiliations

Center for Membrane Separations, Adsorption, Catalysis, and Spectroscopy (cMACS), KU Leuven - University of Leuven, Celestijnenlaan 200F, Leuven, 3001, Belgium

Sustainable Energy, Air & Water Technology (DuEL), Department of Bioscience Engineering, University of Antwerp, Groenenborgerlaan 171, Antwerp 2020, Belgium

Research Group of Electrochemical and Surface Engineering, Department of Materials and Chemistry, Vrije Universiteit Brussel, Pleinlaan 2, Brussels 1050, Belgium

Imec, Kapeldreef 75, Leuven 3001, Belgium

Catalan Institute of Nanoscience and Nanotechnology (ICN2), CSIC and The Barcelona Institute of Science and Technology, Campus UAB, Bellaterra, Barcelona 08193, Spain

ICREA Pg. LluísCompanys23, Barcelona 08010, Spain

Department of Chemistry, Division of Molecular Imaging and Photonics, KU Leuven, Leuven 3001, Belgium

Funding

Agentschap Innoveren en Ondernemen · KU Leuven · Ministerio de Econom?a y Competitividad · Fonds Wetenschappelijk Onderzoek · H2020 Research Infrastructures · H2020 European Research Council

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