journal article·2007-08-01

Thiosulfate- and Thiosulfonate-Based Etchants for the Patterning of Gold Using Microcontact Printing

Dirk Burdinski, Martin H. Blees

Chemistry of Materials· Volume 19· Issue 16
Publisher page

Abstract

The transcription of microcontact-printed self-assembled monolayer patterns into gold substrates requires a wet chemical etch process that selectively dissolves unprotected metal without attacking SAM-covered gold regions. Gold dissolution in a standard thiosulfate−ferricyanide etch solution, the most commonly used etchant containing sulfur-based ligands, shows a complex kinetic behavior. Etch-rate-determining under most conditions are the concentrations of thiosulfate, ferricyanide, and hydroxide. The etch process is accelerated under high ionic strength conditions, in particular in the presence of potassium ions. This is ascribed to the formation of potassium−reagent ion pairs, which reduce the Coulomb repulsion between the negatively charged reaction partners. The thiosulfate−ferricyanide etchant is intrinsically unstable due to the reduction of the ferricyanide oxidant during thiosulfate decomposition. The gold ligand thiosulfate was therefore substituted with benzenethiosulfonate, which was expected to be less oxidation sensitive. The new bath decomposed in the course of days instead of several hours. Since the etch efficiency was also reduced, a significantly higher concentration of the gold ligand was required to achieve a sufficiently high etch rate. The somewhat lower etch quality of the new bath could be compensated for by introducing a new defect healing additive, 1-decanesulfonamide, which was found to be more effective than 1-octanol in the new etchant.
Source: openalex_inverted_index · Quality: baseline

Research context

OpenAlex topics: Nanofabrication and Lithography Techniques · Force Microscopy Techniques and Applications · Advanced Surface Polishing Techniques

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

Affiliations

Bio-Molecular Engineering, Philips Research Europe, High Tech Campus 11, 5656 AE Eindhoven, The Netherlands

References (63)

Show source-provided references
1. Menard, E.; Rogers, J. A. InSpringer Handbook of Nanotechnology, 2nd ed.; Bhushan, B., Ed.; Springer: New York, 2007; pp 279−297.10.1007/978-3-540-29857-1_9 ↗
2. Rogers J. A. · Mater. Today · 2005 · 8 · 5610.1016/S1369-7021(05)00702-9 ↗
3. Gates B. D. · Chem. Rev. · 2005 · 105 · 119610.1021/cr030076o ↗
4. Quist A. P. · Anal. Bioanal. Chem. · 2005 · 381 · 60010.1007/s00216-004-2847-z ↗
5. Love J. C. · Chem. Rev. · 2005 · 105 · 1169
6. Onclin S. · Angew. Chem. Int. Ed. · 2005 · 44 · 630410.1002/anie.200500633 ↗
7. Nicol M. · J. Gold Bull. · 1980 · 13 · 55
8. Nicol M. · J. Gold Bull. · 1980 · 13 · 111
9. Senanayake G. · Miner. Eng. · 2004 · 17 · 80110.1016/j.mineng.2004.01.008 ↗
10. Eidelloth W. · Appl. Phys. Lett. · 1991 · 59 · 1634
11. Kumar A. · Langmuir · 1994 · 10 · 1511
12. Xia Y. · Microelectron. Eng. · 1996 · 32 · 268
13. Xia Y. · Chem. Mater. · 1995 · 7 · 2337
14. Balmer T. E. · Langmuir · 2005 · 21 · 63210.1021/la048273l ↗
15. Geissler M. · Langmuir · 2003 · 19 · 6311
16. Delamarche E. · J. Am. Chem. Soc. · 2002 · 124 · 383510.1021/ja017854j ↗
17. Saalmink M. · Langmuir · 2006 · 22 · 102610.1021/la052513v ↗
18. Perl A. · Langmuir · 2006 · 22 · 757310.1021/la060625w ↗
19. Kumar A. · J. Am. Chem. Soc. · 1992 · 114 · 918910.1021/ja00049a062 ↗
20. Kumar A. · Appl. Phys. Lett. · 1993 · 63 · 2004
21. Wilbur J. L. · Adv. Mater. · 1994 · 6 · 60410.1002/adma.19940060719 ↗
22. Hiskey J. B. · Miner. Process. Extra. Metall. Rev. · 1988 · 4 · 134
23. Ducker R. E. · J. Am. Chem. Soc. · 2006 · 128 · 39310.1021/ja0555771 ↗
24. Geissler M. · Langmuir · 2002 · 18 · 237710.1021/la0155909 ↗
25. Burdinski D. · J. Am. Chem. Soc. · 2005 · 127 · 1078710.1021/ja0523791 ↗
26. Bietsch A. · J. Appl. Phys. · 2000 · 88 · 431810.1063/1.1289816 ↗
27. Decré M. M. J. · Langmuir · 2005 · 21 · 7978
28. Huang Y. Y. · Langmuir · 2005 · 21 · 8068
29. Guo Q. · Nano Lett. · 2004 · 4 · 1662
30. Sharp K. G. · Langmuir · 2004 · 20 · 643810.1021/la036332+ ↗
31. Sharpe R. B. A. · Langmuir · 2004 · 20 · 8651
32. Delamarche E. · J. Phys. Chem. B · 1998 · 102 · 333410.1021/jp980556x ↗
33. Sharpe R. B. A. · Nano Lett. · 2006 · 6 · 1239
34. Schmid G. M. · 1975 · 178
35. Zhang X. M. · J. Hydrometallurgy · 2004 · 74 · 25710.1016/j.hydromet.2004.05.007 ↗
36. Perera W. N. · Inorg. Chem. · 2004 · 43 · 305610.1021/ic035301z ↗
37. Ruben H. · Inorg. Chem. · 1974 · 13 · 183910.1021/ic50138a011 ↗
38. Spiro M. · J. Chem. Soc. · 1965 · 78 · 96
39. Chandra I. · Hydrometallurgy · 2004 · 73 · 31210.1016/j.hydromet.2003.12.002 ↗
40. Aylmore M. G. · Miner. Eng. · 2001 · 14 · 174
41. Breuer P. L. · Miner. Eng. · 2000 · 13 · 108110.1016/S0892-6875(00)00091-1 ↗
42. Power, G. P.; Ritchie, I. M. InModern Aspects of Electrochemistry; Plenum Press: London, 1975; Vol. 2, pp 199−250.
43. Wilkins R. G. · 199110.1002/3527600825 ↗
44. Sharpe R. B. A. · J. Am. Chem. Soc. · 2006 · 128 · 15561
45. Senanayake G. · Gold Bull. · 2005 · 38 · 17910.1007/BF03215257 ↗
46. Zhang S. · J. Appl. Electrochem. · 2003 · 33 · 775
47. Lay M. D. · Langmuir · 2003 · 19 · 8427
48. Woods R. · J. Electrochem. Soc. · 2006 · 153 · D11310.1149/1.2195889 ↗
49. Perrin D. D. · 1982
50. Senanayake G. · Hydrometallurgy · 2005 · 76 · 23810.1016/j.hydromet.2004.11.002 ↗
51. Zahl A. · Inorg. Chem. · 2002 · 41 · 76410.1021/ic010957i ↗
52. Schoenfisch M. H. · Langmuir · 1999 · 15 · 51710.1021/la9811618 ↗
53. Senanayake G. · Hydrometallurgy · 2005 · 77 · 29310.1016/j.hydromet.2004.12.003 ↗
54. French M. · Langmuir · 1998 · 14 · 213310.1021/la971226r ↗
55. Riddick J. A. · 1986
56. Ahern N. · Can. Metal. Quart. · 2006 · 45 · 14410.1179/cmq.2006.45.2.135 ↗
57. Howlett K. E. · Inorg. Chim. Acta · 1976 · 18 · 13810.1016/S0020-1693(00)95592-0 ↗
58. Panda R. K. · Bull. Soc. Chim. Belg. · 1981 · 90 · 101610.1002/bscb.19810901003 ↗
59. Dasgupta G. · Afinidad · 1985 · 42 · 508
60. Freund P. L. · J. Phys. Chem. · 1985 · 89 · 107710.1021/j100253a007 ↗
61. Li Y. · J. Phys. Chem. B · 2000 · 104 · 10959
62. Sharma R. K. · J. Colloid Interface Sci. · 2003 · 265 · 14010.1016/S0021-9797(03)00463-6 ↗
63. Chandra I. · Hydrometallurgy · 2005 · 77 · 20110.1016/j.hydromet.2004.12.002 ↗