Route to Three-Dimensional Metallized Microstructures Using Cross-Linkable Epoxide SU-8
Source abstract
Abstract
Distortion-free metallized three-dimensional (3D) microstructures can be created by multiphoton direct laser writing using SU-8 followed by surface-catalyzed electroless deposition. The approach provides a route to 3D micrometer-scale structures and devices having useful electronic, photonic, and electromechanical function, based on a pre-polymer that is widely applied for such applications.
Source: openalex_inverted_index · Quality: baseline
Research context
OpenAlex topics: Nonlinear Optical Materials Studies · Nanofabrication and Lithography Techniques · Laser Material Processing Techniques
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
Department of Chemistry and CREOL, The College of Optics and Photonics, University of Central Florida, Orlando, Florida 32816
References (26)
Show source-provided references
1. Jiang L. M. · J. Electroanal. Chem. · 2005 · 581 · 15310.1016/j.jelechem.2004.11.041 ↗
2. Smoukov S. K. · Adv. Mater. · 2005 · 17 · 75110.1002/adma.200401010 ↗
3. Yoon Y.-K. · J. Microelectromech. Syst. · 2006 · 15 · 112110.1109/JMEMS.2006.879669 ↗
4. Kozlov M. E. · 2007
5. Wu E. S. · 1992
6. Maruo S. · Opt. Lett. · 1997 · 22 · 13210.1364/OL.22.000132 ↗
7. (c) Kuebler, S. M.; Rumi, M. InEncyclopedia of Modern Optics; Guenther, R. D., Steel, D. G., Bayvel, L., Eds.; Elsevier: Oxford, U.K., 2004; p 189.10.1016/B0-12-369395-0/00761-2 ↗
8. Li L. · Mater. Today · 2007 · 10 · 3010.1016/S1369-7021(07)70130-X ↗
9. Hill R. T. · J. Am. Chem. Soc. · 2005 · 127 · 1070710.1021/ja052211f ↗
10. Farrer M. R. · J. Am. Chem. Soc. · 2006 · 128 · 179610.1021/ja0583620 ↗
11. Chen Y.-S. · Adv. Funct. Mater. · 2006 · 16 · 173910.1002/adfm.200600394 ↗
12. Formanek F. · Appl. Phys. Lett. · 2006 · 88 · 08311010.1063/1.2178261 ↗
13. Odian G. · 200410.1002/047147875X ↗
14. Guerin L. J. · 1997
15. Lee K. Y. · J. Vac. Sci. Technol., B · 1995 · 13 · 301210.1116/1.588297 ↗
16. Lorenz H. · J. Micromech. Microeng. · 1997 · 7 · 12110.1088/0960-1317/7/3/010 ↗
17. Llobera A. · J. Microelectromech. Syst. · 2007 · 16 · 12110.1109/JMEMS.2006.885845 ↗
18. Chung C. K. · J. Micromech. Microeng. · 2007 · 17 · 20710.1088/0960-1317/17/2/004 ↗
19. Rajaraman S. · J. Micromech. Microeng. · 2007 · 17 · 16310.1088/0960-1317/17/1/021 ↗
20. Teh W. H. · J. Appl. Phys. · 2005 · 97 · 05490710.1063/1.1856214 ↗
21. Henry A. C. · J. Phys. Chem. B · 2001 · 105 · 875510.1021/jp011298y ↗
22. Lee P. C. · J. Phys. Chem. · 1982 · 86 · 339110.1021/j100214a025 ↗
23. Ho K. M. · Solid State Commun. · 1994 · 89 · 41310.1016/0038-1098(94)90202-X ↗
24. Sacher E. · 199010.1021/bk-1990-0440 ↗
25. (b)Metallized Plastics 5 & 6: Fundamental and Applied Aspects; Mittal, K. L., Ed.; VSP: Utrecht, The Netherlands, 1998.
26. Link S. · J. Phys. Chem. B · 1999 · 103 · 841010.1021/jp9917648 ↗