Nanopatterned Magnetic Metal via Colloidal Lithography with Reactive Ion Etching
Source abstract
Abstract
A novel method for the fabrication of patterned arrays of Co/Pt by using colloidal lithography with reactive ion etching is described. Specifically, we created the magnetic metal patterns with controllable features using the RIE-assisted colloidal masks, and analyzed the magnetic properties of the metal dots.
Source: openalex_inverted_index · Quality: baseline
Research context
OpenAlex topics: Nanofabrication and Lithography Techniques · Gold and Silver Nanoparticles Synthesis and Applications · Microfluidic and Bio-sensing Technologies
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
Department of Chemical and Biomolecular Engineering and Department of Physics & Center for Nanospinics of Spintronic Materials, Korea Advanced Institute of Science and Technology, 373-1 Guseong-dong, Yuseong-gu, Daejeon 305-701, Korea
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