Ion Exchange in Ultrathin Films of Cu2S and ZnS under Atomic Layer Deposition Conditions
Source abstract
Abstract
Atomic layer deposition allows for a wide variety of materials to be deposited in nearly ideal, conformal multilayers. We report a marked deviation from this behavior, in the form of ion exchange, in two metal sulfide systems when using standard precursors and typical growth conditions.
Source: openalex_inverted_index · Quality: baseline
Research context
OpenAlex topics: Semiconductor materials and devices · Electronic and Structural Properties of Oxides · Quantum Dots Synthesis And Properties
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
Material Science Division, ‡Energy Science Division, and §Physical Sciences and Engineering, Argonne National Laboratory, Argonne, Illinois 60439, United States
References (19)
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