Tuning the Pore Size of Ink-Bottle Mesopores by Atomic Layer Deposition
Source abstract
Abstract
Atomic layer deposition is demonstrated to be greatly suitable to tune the pore size of ink-bottle mesopores at the atomic level. This is confirmed by quantitative electron tomography, which enables a direct and local 3D characterization of an ultrathin HfO2 coating deposited in the mesopores of a thin titania film.
Source: openalex_inverted_index · Quality: baseline
Research context
OpenAlex topics: Semiconductor materials and devices · Electronic and Structural Properties of Oxides · Advanced Electron Microscopy Techniques and Applications
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
Department of Solid State Sciences, COCOON, Ghent University, Krijgslaan 281/S1, B-9000 Ghent, Belgium
EMAT, University of Antwerp, Groenenborgerlaan 171, B-2020 Antwerp, Belgium
Department of Inorganic and Physical Chemistry, COMOC, Ghent University, Krijgslaan 281/S3, B-9000 Ghent, Belgium
IMEC, Kapeldreef 75, B-3001 Leuven, Belgium
Physics Department, Boston University, 590 Commonwealth Avenue, Boston, Massachusetts 02215, United States
References (22)
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