Detection of a Formate Surface Intermediate in the Atomic Layer Deposition of High-κ Dielectrics Using Ozone
Source abstract
Abstract
In situ FTIR studies of O3 interacting with TMA-derived Al2O3 surfaces reveal that O incorporation into the surface results in a stable formate intermediate. DFT calculations provide conclusive band assignments, identifying the surface species. These results have broad implications for understanding the high-κ dielectric ALD process using an O3 precursor
Source: openalex_inverted_index · Quality: baseline
Research context
OpenAlex topics: Semiconductor materials and devices · Copper Interconnects and Reliability · Ferroelectric and Piezoelectric Materials
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
Laboratory for Surface Modification, Rutgers University, Piscataway, New Jersey 08854, Materials Science Division, Accelrys Inc., San Diego, California 92121, and Department of Materials Science and Engineering, University of Texas at Dallas, Richardson, Texas 75080
References (39)
Show source-provided references
1. Manasevit H. M. · J. Electrochem. Soc. · 1971 · 118 · 64710.1149/1.2408131 ↗
2. Demchuk A. · J. Phys. Chem. A · 2003 · 107 · 172710.1021/jp022252n ↗
3. Schmidt J. · J. Chem. Phys. · 2002 · 116 · 1086110.1063/1.1479722 ↗
4. Anwander R. · Organometallics · 1998 · 17 · 202710.1021/om9710632 ↗
5. Wilk G. D. · J. Appl. Phys. · 2001 · 89 · 524310.1063/1.1361065 ↗
6. Biercuk M. J. · Appl. Phys. Lett. · 2003 · 83 · 240510.1063/1.1612904 ↗
7. Ye P. D. · Appl. Phys. Lett. · 2004 · 84 · 43410.1063/1.1641527 ↗
8. George S. M. · J. Phys. Chem. · 1996 · 100 · 1312110.1021/jp9536763 ↗
9. Matsuwaki T. · J. Phys. IV · 2001 · 11 · 63
10. Gosset J. G. · J. Non-Cryst. Solids · 2002 · 303 · 1710.1016/S0022-3093(02)00958-4 ↗
11. Halls M. D. · J. Phys. Chem. B · 2004 · 108 · 405810.1021/jp0378079 ↗
12. Puurunen R. L. · J. Appl. Phys. · 2005 · 97 · 12130110.1063/1.1940727 ↗
13. Dallera C. · Appl. Phys. Lett. · 2006 · 89 · 18352110.1063/1.2374843 ↗
14. Wang Y. · Appl. Phys. Lett. · 2007 · 90 · 02290610.1063/1.2430908 ↗
15. Kim J. B. · J. Appl. Phys. · 2002 · 92 · 673910.1063/1.1515951 ↗
16. Cho M. · J. Electrochem. Soc. · 2005 · 152 · F4910.1149/1.1884130 ↗
17. Kim S. K. · J. Electrochem. Soc. · 2006 · 153 · F6910.1149/1.2177047 ↗
18. Prechtl G. · IEEE Int. Electron Devices · 2003 · 9 · 6
19. Elliott S. D. · Chem. Mater. · 2006 · 18 · 376410.1021/cm0608903 ↗
20. Goldstein G. N. · 2006
21. Delley B. · J. Chem. Phys. · 2000 · 113 · 775610.1063/1.1316015 ↗
22. Perdew J. P. · Phys. Rev. Lett. · 1996 · 77 · 386510.1103/PhysRevLett.77.3865 ↗
23. Periodic atomistic models were based on a 5-layer slab of the (001)-Al2O3surface. Calculations were carried out for the -Al(CH3)2,Al(OCH3)2,Al(OH)2, and -Al(OOCH) species using 2×1 and 2×2 supercells, respectively, with a 20 Å vacuum slab. A Monkhorst-Pack k-point mesh with a spacing of 0.04 Å−1was used to sample the Brillouin zone. For the cluster models, cluster stoichiometries of Al2O3H2-(CH3)2, Al2O3H2-(OCH3)2, Al2O3H2-(OH)2, and Al2O3-(OOCH)2were used.
24. Frank M. M. · Appl. Phys. Lett. · 2003 · 82 · 475810.1063/1.1585129 ↗
25. Boiadjiev V. · Chem. Mater. · 1998 · 10 · 33410.1021/cm970496s ↗
26. Lopez S. Y. R. · Adv. Technol. Mater. Mater. Process. J. · 2006 · 8 · 55
27. Hussein G. A. M. · J. Chem. Soc., Faraday Tran. · 1991 · 87 · 265510.1039/FT9918702655 ↗
28. McInroy A. R. · Langmuir · 2005 · 21 · 1109210.1021/la051429c ↗
29. Greenler R. · J. Chem. Phys. · 1962 · 37 · 209410.1063/1.1733430 ↗
30. Busca G. · Catal. Today · 1996 · 27 · 45710.1016/0920-5861(95)00162-X ↗
31. Clarke D. B. · J. Catal. · 1994 · 150 · 8110.1006/jcat.1994.1324 ↗
32. Fisher I. A. · J. Catal. · 1999 · 184 · 35710.1006/jcat.1999.2420 ↗
33. Sakakini B. · Faraday Discuss. · 1996 · 105 · 36910.1039/fd9960500369 ↗
34. Bulanin K. M. · J. Phys. Chem. · 1995 · 99 · 1029410.1021/j100025a034 ↗
35. Bulanin K. M. · Colloids Surf., A · 1995 · 101 · 15310.1016/0927-7757(95)03130-6 ↗
36. Mars P. · Adv. Catal. · 1963 · 14 · 3510.1016/S0360-0564(08)60338-7 ↗
37. Morikawa Y. · J. Phys. Chem. B · 2004 · 108 · 1444610.1021/jp0497460 ↗
38. Patermarakis G. · Appl. Catal., A · 2003 · 252 · 23110.1016/S0926-860X(03)00411-3 ↗
39. Heil S. B. A. · Appl. Phys. Lett. · 2006 · 89 · 13150510.1063/1.2357886 ↗