journal article·2009-11-10Open access

Applications of Photocurable PMMS Thiol−Ene Stamps in Soft Lithography

Luis M. Campos, Tu T. Truong, Dong Eun Shim, Michael D. Dimitriou, Daniel Shir, Ines Meinel, Jeffrey A. Gerbec, H. Thomas Hahn, John A. Rogers, Craig J. Hawker

Chemistry of Materials· Volume 21· Issue 21

Abstract

We report the performance and characterization of a material based on poly[(3-mercaptopropyl)methylsiloxane] (PMMS) in various soft lithography applications. PMMS stamps were made by cross-linking with triallyl cyanurate and ethoxylated (4) bisphenol A dimethacrylate via thiol−ene mixed-mode chemistry. The surface chemistry of the materials was characterized by XPS when varied from hydrophilic through oxygen plasma treatment, to hydrophobic by exposure to a fluorinated trichlorosilane agent. The materials are transparent above 300 nm and thermally stable up to 225 °C, thus rendering them capable to be employed in step-and-flash imprint lithography, nanoimprint lithography, nanotransfer printing, and proximity-field nanopatterning. The successful pattern replication from the micrometer to sub-100 nm scale was demonstrated.
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Research context

OpenAlex topics: Nanofabrication and Lithography Techniques · Advancements in Photolithography Techniques · Force Microscopy Techniques and Applications

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

Affiliations

Materials Research Laboratory, Mitsubishi Chemical Center for Advanced Materials, Department of Chemistry and Biochemistry, and Materials Department, University of California, Santa Barbara, California 93106

Department of Chemistry, Department of Materials Science and Engineering, and Department of Electrical and Computer Engineering, Beckman Institute and Frederick Seitz Materials Research Laboratory, University of Illinois at Urbana-Champaign, Urbana, Illinois 61801

Department of Mechanical and Aerospace Engineering and Multifunctional Composites Laboratory, University of California, Los Angeles, California 90095

MC Research and Innovation Center, 601 Pine Avenue, Goleta, California 93117

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